@inproceedings{ManleyKruegerBodermannetal., author = {Manley, Phillip and Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Heinrich, Andreas and Eder, Christian and Goehnermeier, Aksel and Zeiser, Ulrike and Hammerschmidt, Martin and Zschiedrich, Lin and Schneider, Philipp-Immanuel}, title = {Efficient simulation of microscopic imaging for reconstruction of nanostructures}, series = {Proc. SPIE}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2673077}, pages = {PC126190B}, language = {en} } @inproceedings{KruegerBodermannKoeningetal., author = {Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Manley, Phillip and Zschiedrich, Lin and Schneider, Philipp-Immanuel and Heinrich, Andreas and Eder, Christian and Zeiser, Ulrike and Goehnermeier, Aksel}, title = {On aberration retrieval for optical microscopes in length metrology}, series = {Proc. SPIE}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2672294}, pages = {PC126190A}, language = {en} } @article{KruegerManleyBergmannetal., author = {Kr{\"u}ger, Jan and Manley, Phillip and Bergmann, Detlef and K{\"o}ning, Rainer and Bodermann, Bernd and Eder, Christian and Heinrich, Andreas and Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Zschiedrich, Lin and Manske, Eberhard}, title = {Introduction and application of a new approach for model-based optical bidirectional measurements}, series = {Meas. Sci. Technol.}, journal = {Meas. Sci. Technol.}, doi = {10.1088/1361-6501/ad4b53}, language = {en} }