@inproceedings{ScholzeBodermannBurgeretal., author = {Scholze, Frank and Bodermann, Bernd and Burger, Sven and Endres, Johannes and Haase, Anton and Krumrey, Michael and Laubis, Christian and Soltwisch, Victor and Ullrich, Albrecht and Wernecke, Jan}, title = {Determination of line profiles on photomasks using DUV, EUV and X-ray scattering}, series = {Proc. SPIE}, volume = {9231}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2065941}, pages = {92310M}, language = {en} }