@article{EndresBurgerWurmetal.2013, author = {Endres, Johannes and Burger, Sven and Wurm, Matthias and Bodermann, Bernd}, title = {Numerical investigations of the influence of different commonly applied approximations in scatterometry}, series = {Proc. SPIE}, volume = {8789}, journal = {Proc. SPIE}, doi = {10.1117/12.2022108}, pages = {878904}, year = {2013}, language = {en} }