@inproceedings{BurgerSchmidtZschiedrich2003, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems}, series = {Dig. LEOS/IEEE 2003 Summer Topicals}, booktitle = {Dig. LEOS/IEEE 2003 Summer Topicals}, doi = {10.1109/LEOSST.2003.1224282}, pages = {75}, year = {2003}, language = {en} } @inproceedings{BurgerKloseMaerzetal.2004, author = {Burger, Sven and Klose, Roland and M{\"a}rz, Reinhard and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Efficient Finite Element Methods for the Design of Microoptical Components}, series = {Proc. Microoptics Conf. 2004}, booktitle = {Proc. Microoptics Conf. 2004}, year = {2004}, language = {en} } @inproceedings{MaerzBurgerForcheletal.2004, author = {M{\"a}rz, Reinhard and Burger, Sven and Forchel, A. and Heidrich, H. and Hess, O. and Michaelis, D. and Wandel, K. and Wehrspohn, R.}, title = {High-contrast planar photonic crystals}, series = {Nanophotonics for Communication}, volume = {5597}, booktitle = {Nanophotonics for Communication}, editor = {Lipson, M.}, publisher = {Proc. SPIE}, doi = {10.1117/12.580070}, pages = {68 -- 81}, year = {2004}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2005, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Gao, W. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation}, series = {Photomask Technology}, volume = {5992}, booktitle = {Photomask Technology}, editor = {Weed, J. and Martin, P.}, publisher = {Proc. SPIE}, doi = {10.1117/12.631696}, pages = {378 -- 389}, year = {2005}, language = {en} } @inproceedings{BurgerZschiedrichKloseetal.2005, author = {Burger, Sven and Zschiedrich, Lin and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Enkrich, Christian and Linden, S. and Wegener, M. and Soukoulis, C.}, title = {Numerical Investigation of Light Scattering off Split-Ring Resonators}, series = {Metamaterials}, volume = {5955}, booktitle = {Metamaterials}, editor = {Szoplik, T. and {\"O}zbay, E. and Soukoulis, C. and Zheludev, N.}, publisher = {Proc. SPIE}, doi = {10.1117/12.622184}, pages = {18 -- 26}, year = {2005}, language = {en} } @inproceedings{BurgerKloseSchaedleetal.2005, author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM modelling of 3D photonic crystals and photonic crystal waveguides}, series = {Integrated Optics : Devices, Materials and Technologies IX}, volume = {5728}, booktitle = {Integrated Optics : Devices, Materials and Technologies IX}, editor = {Sidorin, Y. and W{\"a}chter, Christoph}, publisher = {Proc. SPIE}, doi = {10.1117/12.585895}, pages = {164 -- 173}, year = {2005}, language = {en} } @inproceedings{SchmidtBurgerSchaedleetal.2005, author = {Schmidt, Frank and Burger, Sven and Sch{\"a}dle, Achim and Klose, Roland}, title = {Finite element methods for optical device design}, series = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices}, booktitle = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices}, doi = {10.1109/NUSOD.2005.1518133}, pages = {57 -- 58}, year = {2005}, language = {en} } @inproceedings{KloseBurgerSchmidtetal.2005, author = {Klose, Roland and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {A multilevel method for the computation of eigenmodes in 3D photonic crystals}, series = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic Devices}, booktitle = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic Devices}, doi = {10.1109/NUSOD.2005.1518135}, pages = {61 -- 62}, year = {2005}, language = {en} } @inproceedings{ZschiedrichBurgerKloseetal.2005, author = {Zschiedrich, Lin and Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {JCMmode: an adaptive finite element solver for the computation of leaky modes}, series = {Integrated Optics: Devices, Materials, and Technologies IX}, volume = {5728}, booktitle = {Integrated Optics: Devices, Materials, and Technologies IX}, editor = {Sidorin, Y. and W{\"a}chter, Christoph}, publisher = {Proc. SPIE}, doi = {10.1117/12.590372}, pages = {192 -- 202}, year = {2005}, language = {en} } @inproceedings{ZschiedrichBurgerSchaedleetal.2005, author = {Zschiedrich, Lin and Burger, Sven and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {Domain decomposition method for electromagnetic scattering problems: application to EUV lithography}, series = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices}, booktitle = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices}, doi = {10.1109/NUSOD.2005.1518132}, pages = {55 -- 56}, year = {2005}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Nguyen, H. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Rigorous Simulation of 3D Masks}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, pages = {63494Z}, year = {2006}, language = {en} } @inproceedings{BurgerSchaedleZschiedrichetal.2006, author = {Burger, Sven and Sch{\"a}dle, Achim and Zschiedrich, Lin and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, series = {Nanophotonics}, volume = {6195}, booktitle = {Nanophotonics}, editor = {Andrews, David L. and Nunzi, Jean-Michel and Ostendorf, Andreas}, publisher = {Proc. SPIE}, doi = {10.1117/12.662942}, pages = {72 -- 82}, year = {2006}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2006, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin and Scholze, Frank}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, doi = {10.1117/12.686828}, pages = {63493D}, year = {2006}, language = {en} } @inproceedings{BurgerZschiedrichSchaedleetal.2006, author = {Burger, Sven and Zschiedrich, Lin and Sch{\"a}dle, Achim and Klose, Roland and Kettner, Benjamin and Pomplun, Jan and Pollok, T. and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, series = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, booktitle = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, year = {2006}, language = {en} } @inproceedings{ZschiedrichBurgerKettneretal.2006, author = {Zschiedrich, Lin and Burger, Sven and Kettner, Benjamin and Schmidt, Frank}, title = {Advanced Finite Element Method for Nano-Resonators}, series = {Proc. SPIE}, volume = {6115}, booktitle = {Proc. SPIE}, doi = {10.1117/12.646252}, pages = {611515}, year = {2006}, language = {en} } @inproceedings{ZschiedrichMaerzBurgeretal., author = {Zschiedrich, Lin and M{\"a}rz, Reinhard and Burger, Sven and Schmidt, Frank}, title = {Efficient 3D Finite Element Simulation of Fiber-Chip Coupling}, series = {Integrated Photonics Research and Applications/Nanophotonics}, booktitle = {Integrated Photonics Research and Applications/Nanophotonics}, doi = {10.1364/IPRA.2006.ITuF1}, pages = {ITuF1}, language = {en} } @inproceedings{ScholzeLaubisDerschetal.2007, author = {Scholze, Frank and Laubis, Christian and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, pages = {66171A}, year = {2007}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2007, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Finite element analysis of EUV lithography}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726156}, pages = {661718}, year = {2007}, language = {en} } @inproceedings{PomplunHolzloehnerBurgeretal.2007, author = {Pomplun, Jan and Holzl{\"o}hner, Ronald and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM investigation of leaky modes in hollow core photonic crystal fibers}, series = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, volume = {6480}, booktitle = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, editor = {Adibi, Ali and Scherer, Axel and Lin, Shawn-Yu}, pages = {64800M}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and Henkel, Thomas and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726236}, pages = {66170V}, year = {2007}, language = {en} }