@inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical investigation of optical resonances in circular grating resonators}, volume = {7606}, booktitle = {Silicon Photonics V}, publisher = {Proc. SPIE}, doi = {10.1117/12.842061}, pages = {760610}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides}, volume = {7609}, booktitle = {Photonic and Phononic Crystal Materials and Devices X}, publisher = {Proc. SPIE}, doi = {10.1117/12.841867}, pages = {76091Q}, year = {2010}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} } @inproceedings{SkibinaIliewBethgeetal.2009, author = {Skibina, Julia and Iliew, Rumen and Bethge, Jens and Bock, Martin and Fischer, Dorit and Beloglazov, Valentin and Wedell, Reiner and Burger, Sven and Steinmeyer, G{\"u}nter}, title = {A chirped photonic crystal fiber for high-fidelity guiding of sub-100 fs pluses}, booktitle = {CLEO/QELS}, doi = {10.1364/CLEO.2009.CMHH1}, pages = {CMHH1}, year = {2009}, language = {en} } @inproceedings{HoffmannHafnerLeidenbergeretal.2009, author = {Hoffmann, Johannes and Hafner, Christian and Leidenberger, P. and Hesselbarth, J. and Burger, Sven}, title = {Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.828036}, pages = {73900J}, year = {2009}, language = {en} } @article{DeckerBurgerLindenetal.2009, author = {Decker, Manuel and Burger, Sven and Linden, S. and Wegener, M.}, title = {Magnetization waves in split-ring-resonator arrays}, volume = {80}, journal = {Phys. Rev. B}, number = {19}, doi = {10.1103/PhysRevB.80.193102}, pages = {193102}, year = {2009}, language = {en} } @article{LockauZschiedrichBurger2009, author = {Lockau, D. and Zschiedrich, Lin and Burger, Sven}, title = {Accurate simulation of light transmission through subwavelength apertures in metal films}, volume = {11}, journal = {J. Opt. A}, arxiv = {http://arxiv.org/abs/0902.2862}, doi = {10.1088/1464-4258/11/11/114013}, pages = {114013}, year = {2009}, language = {en} } @inproceedings{LockauZschiedrichSchmidtetal.2009, author = {Lockau, D. and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven and Rech, Bernd}, title = {Efficient simulation of plasmonic structures for solar cells}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {48}, year = {2009}, language = {en} } @article{KarlKettnerBurgeretal.2009, author = {Karl, M. and Kettner, Benjamin and Burger, Sven and Schmidt, Frank and Kalt, H. and Hetterich, M.}, title = {Dependencies of micro-pillar cavity quality factors calculated with finite element methods}, volume = {17}, journal = {Optics Express}, doi = {10.1364/OE.17.001144}, pages = {1144}, year = {2009}, language = {en} } @article{NeveOzPollokBurgeretal.2009, author = {Neve-Oz, Y. and Pollok, T. and Burger, Sven and Golosovsky, M. and Davidov, D.}, title = {Fast Light and Focusing in 2D Photonic Quasicrystals}, volume = {5}, journal = {PIERS Online}, doi = {10.2529/PIERS081223080021}, pages = {451}, year = {2009}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for computational lithography}, volume = {7488}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.829639}, pages = {74882B}, year = {2009}, language = {en} } @inproceedings{SkibinaIliewBethgeetal.2009, author = {Skibina, Julia and Iliew, Rumen and Bethge, Jens and Bock, Martin and Fischer, Dorit and Beloglazov, Valentin and Wedell, Reiner and Burger, Sven and Steinmeyer, G{\"u}nter}, title = {A chirped photonic crystal fiber for ultrashort laser pulse delivery}, booktitle = {CLEO Europe - EQEC}, doi = {10.1109/CLEOE-EQEC.2009.5196579}, year = {2009}, language = {en} } @article{BethgeSteinmeyerBurgeretal.2009, author = {Bethge, Jens and Steinmeyer, G{\"u}nter and Burger, Sven and Lederer, Falk and Iliew, Rumen}, title = {Guiding properties of chirped photonic crystal fibers}, volume = {27}, journal = {Journal of Lightwave Technology}, doi = {10.1109/JLT.2009.2021583}, pages = {1698}, year = {2009}, language = {en} } @article{Burger2009, author = {Burger, Sven}, title = {Simulation method improves accuracy for optical metrology and nanooptics design}, journal = {SPIE Newsroom}, doi = {10.1117/2.1200905.1629}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrich2009, author = {Burger, Sven and Zschiedrich, Lin}, title = {Numerical Investigation of Silicon-on-Insulator 1D Photonic Crystal Microcavities}, volume = {1176}, booktitle = {Theoretical and computational nanooptics}, editor = {Chigrin, Dmitry}, publisher = {AIP}, doi = {10.1063/1.3253915}, pages = {43 -- 45}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2009, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kettner, Benjamin and Lockau, D.}, title = {3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827543}, pages = {73900H}, year = {2009}, language = {en} } @inproceedings{BurgerLockauZschiedrichetal.2009, author = {Burger, Sven and Lockau, D. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-element simulations of light propagation through subwavelength apertures in metal films}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {59}, year = {2009}, language = {en} } @inproceedings{BurgerKleemannZschiedrichetal.2009, author = {Burger, Sven and Kleemann, B. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures}, volume = {7366}, booktitle = {Microtechnologies for the New Millenium}, publisher = {Proc. SPIE}, doi = {10.1117/12.822828}, pages = {736621}, year = {2009}, language = {en} } @inproceedings{ScholzeLaubisUlmetal.2008, author = {Scholze, Frank and Laubis, Christian and Ulm, Gerhard and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation}, volume = {6921}, booktitle = {Emerging Lithographic Technologies XII}, editor = {Schellenberg, Frank}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2008, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Metrology of EUV masks by EUV-scatterometry and finite element analysis}, volume = {7028}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Horiuchi, Toshiyuki}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{SchmidtBurgerPomplunetal.2008, author = {Schmidt, Frank and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin}, title = {Advanced FEM analysis of optical waveguides: algorithms and applications}, volume = {6896}, booktitle = {Integrated Optics}, editor = {Greiner, Christoph and W{\"a}chter, Christoph}, publisher = {SPIE}, doi = {10.1117/12.765720}, pages = {689602}, year = {2008}, language = {en} } @inproceedings{ZschiedrichBurgerSchaedleetal.2008, author = {Zschiedrich, Lin and Burger, Sven and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {A rigorous finite-element domain decomposition method for electromagnetic near field simulations}, volume = {6924}, booktitle = {Optical Microlithography XXI}, editor = {Levinson, Harry and Dusa, Mircea}, publisher = {SPIE}, doi = {10.1117/12.771989}, year = {2008}, language = {en} } @incollection{PomplunZschiedrichKloseetal.2008, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite Element Simulation of Radiation Losses in Photonic Crystal Fibers}, booktitle = {Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials}, publisher = {Wiley-VCH}, doi = {10.1002/9783527621880.ch17}, pages = {313 -- 331}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Evanschitzky, Peter and Erdmann, Andreas}, title = {Benchmark of rigorous methods for electromagnetic field simulation}, volume = {7122}, booktitle = {Photomask Technology}, editor = {Kawahira, H. and Zurbrick, L. S.}, publisher = {Proc. SPIE}, doi = {10.1117/12.801248}, pages = {71221}, year = {2008}, language = {en} } @incollection{BurgerZschiedrichKettneretal.2008, author = {Burger, Sven and Zschiedrich, Lin and Kettner, Benjamin and Schmidt, Frank}, title = {FEM simulation of light scattering by nonspherical objects}, booktitle = {Mie Theory 1908 - 2008}, editor = {Hergert, W. and Wriedt, T.}, publisher = {Universit{\"a}t Bremen}, pages = {82 -- 83}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, doi = {10.1364/IPNRA.2008.ITuE4}, pages = {ITuE4}, year = {2008}, language = {en} } @article{DollingKleinWegeneretal.2007, author = {Dolling, G. and Klein, M. and Wegener, M. and Sch{\"a}dle, Achim and Burger, Sven and Linden, S.}, title = {Negative beam displacement for negative-index photonic metamaterials}, volume = {15}, journal = {Optics Express}, number = {21}, doi = {10.1364/OE.15.014219}, pages = {14219 -- 14227}, year = {2007}, language = {en} } @article{PearceWiederheckerPoultonetal.2007, author = {Pearce, G. J. and Wiederhecker, G. S. and Poulton, Christopher G. and Burger, Sven and Russell, P. St. J.}, title = {Models for guidance in kagome-structured hollow-core photonic crystal fibres}, volume = {15}, journal = {Optics Express}, doi = {10.1364/OE.15.012680}, pages = {12680}, year = {2007}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2007, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Finite element analysis of EUV lithography}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726156}, pages = {661718}, year = {2007}, language = {en} } @article{SchaedleZschiedrichBurgeretal.2007, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations}, volume = {226}, journal = {J. Comput. Phys.}, doi = {10.1016/j.jcp.2007.04.017}, pages = {477 -- 493}, year = {2007}, language = {en} } @article{PomplunBurgerZschiedrichetal.2007, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Adaptive finite element method for simulation of optical nano structures}, volume = {244}, journal = {Phys. Status Solidi B}, arxiv = {http://arxiv.org/abs/0711.2149}, doi = {10.1002/pssb.200743192}, pages = {3419 -- 3434}, year = {2007}, language = {en} } @inproceedings{PomplunHolzloehnerBurgeretal.2007, author = {Pomplun, Jan and Holzl{\"o}hner, Ronald and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM investigation of leaky modes in hollow core photonic crystal fibers}, volume = {6480}, booktitle = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, editor = {Adibi, Ali and Scherer, Axel and Lin, Shawn-Yu}, pages = {64800M}, year = {2007}, language = {en} } @article{PomplunZschiedrichKloseetal.2007, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite element simulation of radiation losses in photonic crystal fibers}, volume = {204}, journal = {phys. stat. sol. (a)}, number = {11}, doi = {10.1002/pssa.200776414}, pages = {3822 -- 3837}, year = {2007}, language = {en} } @inproceedings{ScholzeLaubisDerschetal.2007, author = {Scholze, Frank and Laubis, Christian and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, pages = {66171A}, year = {2007}, language = {en} } @inproceedings{ZschiedrichBurgerPomplunetal.2007, author = {Zschiedrich, Lin and Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Goal oriented adaptive finite element method for precise simulation of optical components}, volume = {6475}, booktitle = {Proc. SPIE, Integrated Optics}, editor = {Sidorin, Y. and Waechter, Ch.}, pages = {64750H}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and Henkel, Thomas and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726236}, pages = {66170V}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {EMF Simulations of Isolated and Periodic 3D Photomask Patterns}, volume = {6730}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, pages = {6630}, year = {2007}, language = {en} } @misc{SchaedleZschiedrichBurgeretal.2006, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures}, doi = {/10.1016/j.jcp.2007.04.017}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-8984}, number = {06-04}, year = {2006}, abstract = {We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.}, language = {en} } @article{HolzloehnerBurgerRobertsetal.2006, author = {Holzl{\"o}hner, Ronald and Burger, Sven and Roberts, P. and Pomplun, Jan}, title = {Efficient optimization of hollow-core photonic crystal fiber design using the finite-element method}, volume = {1}, journal = {J. Eur. Opt. Soc.-Rapid}, doi = {10.2971/jeos.2006.06011}, pages = {06011}, year = {2006}, language = {en} } @article{DollingWegenerSchaedleetal.2006, author = {Dolling, G. and Wegener, M. and Sch{\"a}dle, Achim and Burger, Sven and Linden, S.}, title = {Observation of magnetization waves in negative-index photonic metamaterials}, volume = {89}, journal = {Appl. Phys. Lett.}, doi = {10.1063/1.2403905}, pages = {231118}, year = {2006}, language = {en} } @article{LindenEnkrichDollingetal.2006, author = {Linden, S. and Enkrich, Christian and Dolling, G. and Klein, M. and Zhou, J. and Koschny, T. and Soukoulis, C. and Burger, Sven and Schmidt, Frank and Wegener, M.}, title = {Photonic metamaterials: Magnetism at Optical Frequencies}, volume = {12}, journal = {IEEE Journal of Selected Topics in Quantum Electronics}, number = {6}, doi = {10.1109/JSTQE.2006.880600}, pages = {1097 -- 1105}, year = {2006}, language = {en} } @article{MichaelisWaechterBurgeretal.2006, author = {Michaelis, D. and W{\"a}chter, Christoph and Burger, Sven and Zschiedrich, Lin and Br{\"a}uer, Andreas}, title = {Micro-optically assisted high index waveguide coupling}, volume = {45}, journal = {Appl. Opt.}, doi = {10.1364/AO.45.001831}, pages = {1831 -- 1838}, year = {2006}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2006, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin and Scholze, Frank}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, doi = {10.1117/12.686828}, pages = {63493D}, year = {2006}, language = {en} } @inproceedings{ZschiedrichBurgerKettneretal.2006, author = {Zschiedrich, Lin and Burger, Sven and Kettner, Benjamin and Schmidt, Frank}, title = {Advanced Finite Element Method for Nano-Resonators}, volume = {6115}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/physics/0601025}, doi = {10.1117/12.646252}, pages = {611515}, year = {2006}, language = {en} } @inproceedings{ZschiedrichMaerzBurgeretal.2006, author = {Zschiedrich, Lin and M{\"a}rz, Reinhard and Burger, Sven and Schmidt, Frank}, title = {Efficient 3D Finite Element Simulation of Fiber-Chip Coupling}, booktitle = {Integrated Photonics Research and Applications/Nanophotonics}, doi = {10.1364/IPRA.2006.ITuF1}, pages = {ITuF1}, year = {2006}, language = {en} } @inproceedings{BurgerZschiedrichSchaedleetal.2006, author = {Burger, Sven and Zschiedrich, Lin and Sch{\"a}dle, Achim and Klose, Roland and Kettner, Benjamin and Pomplun, Jan and Pollok, T. and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, booktitle = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, year = {2006}, language = {en} } @inproceedings{BurgerSchaedleZschiedrichetal.2006, author = {Burger, Sven and Sch{\"a}dle, Achim and Zschiedrich, Lin and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, volume = {6195}, booktitle = {Nanophotonics}, editor = {Andrews, David L. and Nunzi, Jean-Michel and Ostendorf, Andreas}, publisher = {Proc. SPIE}, doi = {10.1117/12.662942}, pages = {72 -- 82}, year = {2006}, language = {en} } @incollection{BurgerKloseSchaedleetal.2006, author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Adaptive FEM solver for the computation of electromagnetic eigenmodes in 3D photonic crystal structures}, booktitle = {Scientific Computing in Electrical Engineering}, publisher = {Springer Verlag}, doi = {10.1007/978-3-540-32862-9_24}, pages = {169 -- 175}, year = {2006}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Nguyen, H. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Rigorous Simulation of 3D Masks}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, pages = {63494Z}, year = {2006}, language = {en} } @article{EnkrichWegenerLindenetal.2005, author = {Enkrich, Christian and Wegener, M. and Linden, S. and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Zhou, C. and Koschny, T. and Soukoulis, C.}, title = {Magnetic metamaterials at telecommunication and visible frequencies}, volume = {95}, journal = {Phys. Rev. Lett.}, arxiv = {http://arxiv.org/abs/cond-mat/0504774}, doi = {10.1103/PhysRevLett.95.203901}, pages = {203901}, year = {2005}, language = {en} }