@inproceedings{PomplunBurgerZschiedrichetal.2011, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Reduced basis method for real-time inverse scatterometry}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889892}, pages = {808308}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, editor = {Bodermann, Bernd}, publisher = {Proc. SPIE}, doi = {10.1117/12.889831}, pages = {80831B}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kato, Akiko and Laubis, Christian and Scholze, Frank}, title = {Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations}, series = {Photomask Technology 2011}, volume = {8166}, booktitle = {Photomask Technology 2011}, publisher = {Proc. SPIE}, doi = {10.1117/12.896839}, pages = {81661Q}, year = {2011}, language = {en} } @inproceedings{BurgerPomplunSchmidtetal.2011, author = {Burger, Sven and Pomplun, Jan and Schmidt, Frank and Zschiedrich, Lin}, title = {Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap}, series = {Physics and Simulation of Optoelectronic Devices XIX}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.875044}, pages = {79330T}, year = {2011}, language = {en} } @inproceedings{LockauZschiedrichBurgeretal.2011, author = {Lockau, D. and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Ruske, F. and Rech, Bernd}, title = {Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures}, series = {Physics and Simulation of Optoelectronic Devices XIX}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.874967}, pages = {79330M}, year = {2011}, language = {en} } @inproceedings{KleemannKurzHetzleretal.2011, author = {Kleemann, B. and Kurz, J. and Hetzler, J. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889364}, pages = {808309}, year = {2011}, language = {en} } @article{ZhaoFrankBurgeretal.2011, author = {Zhao, J. and Frank, B. and Burger, Sven and Giessen, H.}, title = {Large-Area High-Quality Plasmonic Oligomers Fabricated by Angle-Controlled Colloidal Nanolithography}, series = {ACS Nano}, volume = {5}, journal = {ACS Nano}, number = {11}, doi = {10.1021/nn203177s}, pages = {9009}, year = {2011}, language = {en} } @inproceedings{PomplunBurgerRozovaetal.2011, author = {Pomplun, Jan and Burger, Sven and Rozova, Maria and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite element simulation of optical modes in VCSELs}, series = {Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on}, booktitle = {Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on}, doi = {10.1109/NUSOD.2011.6041170}, pages = {119 -- 120}, year = {2011}, language = {en} } @article{SchlosserSchothBurgeretal.2011, author = {Schlosser, Felix and Schoth, Mario and Burger, Sven and Schmidt, Frank and Knorr, Andreas and Mukamel, S. and Richter, Marten}, title = {Ultrafast nonlinear spectroscopy with spatially confined fields}, series = {AIP Conference Proceedings}, volume = {1398}, journal = {AIP Conference Proceedings}, publisher = {AIP}, doi = {10.1063/1.3644223}, pages = {94 -- 96}, year = {2011}, language = {en} } @inproceedings{SchmidtPomplunZschiedrichetal.2011, author = {Schmidt, Frank and Pomplun, Jan and Zschiedrich, Lin and Burger, Sven}, title = {Fast online simulation of 3D nanophotonic structures by the reduced basis method}, series = {Integrated Optics: Devices, Materials, and Technologies XV}, volume = {7941}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XV}, publisher = {Proc. SPIE}, doi = {10.1117/12.874726}, pages = {79410G}, year = {2011}, language = {en} } @inproceedings{WongKangLeeetal.2011, author = {Wong, G. and Kang, M. and Lee, H. and Burger, Sven and Zschiedrich, Lin and Biancalana, F. and Russell, P.}, title = {Strongly Twisted Solid-Core PCF: A One-Dimensional Chiral Metamaterial}, series = {Frontiers in Optics}, booktitle = {Frontiers in Optics}, publisher = {Optical Society of America}, doi = {10.1364/FIO.2011.FMG3}, pages = {FMG3}, year = {2011}, language = {en} } @inproceedings{WenzelCrumpEkhteraeietal., author = {Wenzel, Hans and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Erbert, G{\"o}tz}, title = {Theoretical and experimental analysis of the lateral modes of high-power broad-area lasers}, series = {Numerical Simulation of Optoelectronic Devices}, booktitle = {Numerical Simulation of Optoelectronic Devices}, doi = {10.1109/NUSOD.2011.6041183}, pages = {143 -- 144}, language = {en} } @inproceedings{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWB7}, pages = {IWB7}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM simulation of resonances in low-Q cavities for plasmon lasers}, series = {International Workshop on Photonic Nanomaterials}, booktitle = {International Workshop on Photonic Nanomaterials}, editor = {Jena, Friedrich-Schiller-Universit{\"a}t}, isbn = {978-3-00-031358-5}, pages = {36}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical investigation of optical resonances in circular grating resonators}, series = {Silicon Photonics V}, volume = {7606}, booktitle = {Silicon Photonics V}, publisher = {Proc. SPIE}, doi = {10.1117/12.842061}, pages = {760610}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides}, series = {Photonic and Phononic Crystal Materials and Devices X}, volume = {7609}, booktitle = {Photonic and Phononic Crystal Materials and Devices X}, publisher = {Proc. SPIE}, doi = {10.1117/12.841867}, pages = {76091Q}, year = {2010}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, series = {Photomask Technology}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2010, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite element method for accurate 3D simulation of plasmonic waveguides}, series = {Integrated Optics: Devices, Materials, and Technologies XIV}, volume = {7604}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XIV}, publisher = {Proc. SPIE}, doi = {10.1117/12.841995}, pages = {76040F}, year = {2010}, language = {en} } @article{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM Simulation of Plasmon Laser Resonances}, series = {AIP Conference Proceedings}, volume = {1281}, journal = {AIP Conference Proceedings}, publisher = {AIP}, doi = {10.1063/1.3498131}, pages = {1613 -- 1616}, year = {2010}, language = {en} } @article{NeveOzPollokBurgeretal.2010, author = {Neve-Oz, Y. and Pollok, T. and Burger, Sven and Golosovsky, M. and Davidov, D.}, title = {Resonant Transmission of Electromagnetic Waves through 2D Photonic Quasicrystals}, series = {J. Appl. Phys.}, volume = {107}, journal = {J. Appl. Phys.}, doi = {10.1063/1.3329542}, pages = {063105}, year = {2010}, language = {en} } @article{NeveOzPollokBurgeretal.2010, author = {Neve-Oz, Y. and Pollok, T. and Burger, Sven and Golosovsky, M. and Lifshitz, R. and Davidov, D.}, title = {Negative Refraction and Omni Directionality in 2D Photonic Quasicrystal Superstructure}, series = {AIP Conference Proceedings}, volume = {1281}, journal = {AIP Conference Proceedings}, publisher = {AIP}, doi = {10.1063/1.3498134}, pages = {1622}, year = {2010}, language = {en} } @article{PomplunBurgerSchmidtetal.2010, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Schliwa, Andrei and Bimberg, Dieter and Pietrzak, Agnieszka and Wenzel, Hans and Erbert, G{\"o}tz}, title = {Finite element simulation of the optical modes of semiconductor lasers}, series = {Phys. Status Solidi B}, volume = {247}, journal = {Phys. Status Solidi B}, doi = {10.1002/pssb.200945451}, pages = {846 -- 853}, year = {2010}, language = {en} } @inproceedings{PomplunSchmidtBurgeretal.2010, author = {Pomplun, Jan and Schmidt, Frank and Burger, Sven and Zschiedrich, Lin}, title = {Adaptive Reduced Basis Method for Optical Scattering Problems}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWD4}, pages = {IWD4}, year = {2010}, language = {en} } @article{GanselWegenerBurgeretal.2010, author = {Gansel, J. and Wegener, M. and Burger, Sven and Linden, S.}, title = {Gold helix photonic metamaterials: a numerical parameter study}, series = {Opt. Express}, volume = {18}, journal = {Opt. Express}, doi = {10.1364/OE.18.001059}, pages = {1059 -- 1069}, year = {2010}, language = {en} } @article{Burger2009, author = {Burger, Sven}, title = {Simulation method improves accuracy for optical metrology and nanooptics design}, series = {SPIE Newsroom}, journal = {SPIE Newsroom}, doi = {10.1117/2.1200905.1629}, year = {2009}, language = {en} } @article{BethgeSteinmeyerBurgeretal.2009, author = {Bethge, Jens and Steinmeyer, G{\"u}nter and Burger, Sven and Lederer, Falk and Iliew, Rumen}, title = {Guiding properties of chirped photonic crystal fibers}, series = {Journal of Lightwave Technology}, volume = {27}, journal = {Journal of Lightwave Technology}, doi = {10.1109/JLT.2009.2021583}, pages = {1698}, year = {2009}, language = {en} } @inproceedings{BurgerKleemannZschiedrichetal.2009, author = {Burger, Sven and Kleemann, B. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures}, series = {Microtechnologies for the New Millenium}, volume = {7366}, booktitle = {Microtechnologies for the New Millenium}, publisher = {Proc. SPIE}, doi = {10.1117/12.822828}, pages = {736621}, year = {2009}, language = {en} } @inproceedings{BurgerLockauZschiedrichetal.2009, author = {Burger, Sven and Lockau, D. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-element simulations of light propagation through subwavelength apertures in metal films}, series = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {59}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrich2009, author = {Burger, Sven and Zschiedrich, Lin}, title = {Numerical Investigation of Silicon-on-Insulator 1D Photonic Crystal Microcavities}, series = {Theoretical and computational nanooptics}, volume = {1176}, booktitle = {Theoretical and computational nanooptics}, editor = {Chigrin, Dmitry}, publisher = {AIP}, doi = {10.1063/1.3253915}, pages = {43 -- 45}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2009, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kettner, Benjamin and Lockau, D.}, title = {3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films}, series = {Numerical Methods in Optical Metrology}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827543}, pages = {73900H}, year = {2009}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for computational lithography}, series = {Photomask Technology}, volume = {7488}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.829639}, pages = {74882B}, year = {2009}, language = {en} } @article{NeveOzPollokBurgeretal.2009, author = {Neve-Oz, Y. and Pollok, T. and Burger, Sven and Golosovsky, M. and Davidov, D.}, title = {Fast Light and Focusing in 2D Photonic Quasicrystals}, series = {PIERS Online}, volume = {5}, journal = {PIERS Online}, doi = {10.2529/PIERS081223080021}, pages = {451}, year = {2009}, language = {en} } @article{DeckerBurgerLindenetal.2009, author = {Decker, Manuel and Burger, Sven and Linden, S. and Wegener, M.}, title = {Magnetization waves in split-ring-resonator arrays}, series = {Phys. Rev. B}, volume = {80}, journal = {Phys. Rev. B}, number = {19}, doi = {10.1103/PhysRevB.80.193102}, pages = {193102}, year = {2009}, language = {en} } @inproceedings{HoffmannHafnerLeidenbergeretal.2009, author = {Hoffmann, Johannes and Hafner, Christian and Leidenberger, P. and Hesselbarth, J. and Burger, Sven}, title = {Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas}, series = {Numerical Methods in Optical Metrology}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.828036}, pages = {73900J}, year = {2009}, language = {en} } @article{LockauZschiedrichBurger2009, author = {Lockau, D. and Zschiedrich, Lin and Burger, Sven}, title = {Accurate simulation of light transmission through subwavelength apertures in metal films}, series = {J. Opt. A}, volume = {11}, journal = {J. Opt. A}, doi = {10.1088/1464-4258/11/11/114013}, pages = {114013}, year = {2009}, language = {en} } @inproceedings{LockauZschiedrichSchmidtetal.2009, author = {Lockau, D. and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven and Rech, Bernd}, title = {Efficient simulation of plasmonic structures for solar cells}, series = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {48}, year = {2009}, language = {en} } @article{KarlKettnerBurgeretal.2009, author = {Karl, M. and Kettner, Benjamin and Burger, Sven and Schmidt, Frank and Kalt, H. and Hetterich, M.}, title = {Dependencies of micro-pillar cavity quality factors calculated with finite element methods}, series = {Optics Express}, volume = {17}, journal = {Optics Express}, doi = {10.1364/OE.17.001144}, pages = {1144}, year = {2009}, language = {en} } @inproceedings{SkibinaIliewBethgeetal.2009, author = {Skibina, Julia and Iliew, Rumen and Bethge, Jens and Bock, Martin and Fischer, Dorit and Beloglazov, Valentin and Wedell, Reiner and Burger, Sven and Steinmeyer, G{\"u}nter}, title = {A chirped photonic crystal fiber for high-fidelity guiding of sub-100 fs pluses}, series = {CLEO/QELS}, booktitle = {CLEO/QELS}, doi = {10.1364/CLEO.2009.CMHH1}, pages = {CMHH1}, year = {2009}, language = {en} } @inproceedings{SkibinaIliewBethgeetal., author = {Skibina, Julia and Iliew, Rumen and Bethge, Jens and Bock, Martin and Fischer, Dorit and Beloglazov, Valentin and Wedell, Reiner and Burger, Sven and Steinmeyer, G{\"u}nter}, title = {A chirped photonic crystal fiber for ultrashort laser pulse delivery}, series = {CLEO Europe - EQEC}, booktitle = {CLEO Europe - EQEC}, doi = {10.1109/CLEOE-EQEC.2009.5196579}, language = {en} } @incollection{BurgerZschiedrichKettneretal.2008, author = {Burger, Sven and Zschiedrich, Lin and Kettner, Benjamin and Schmidt, Frank}, title = {FEM simulation of light scattering by nonspherical objects}, series = {Mie Theory 1908 - 2008}, booktitle = {Mie Theory 1908 - 2008}, editor = {Hergert, W. and Wriedt, T.}, publisher = {Universit{\"a}t Bremen}, pages = {82 -- 83}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics}, series = {Integrated Photonics and Nanophotonics Research and Applications}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, doi = {10.1364/IPNRA.2008.ITuE4}, pages = {ITuE4}, year = {2008}, language = {en} } @inproceedings{SchmidtBurgerPomplunetal.2008, author = {Schmidt, Frank and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin}, title = {Advanced FEM analysis of optical waveguides: algorithms and applications}, series = {Integrated Optics}, volume = {6896}, booktitle = {Integrated Optics}, editor = {Greiner, Christoph and W{\"a}chter, Christoph}, publisher = {SPIE}, doi = {10.1117/12.765720}, pages = {689602}, year = {2008}, language = {en} } @inproceedings{ScholzeLaubisUlmetal.2008, author = {Scholze, Frank and Laubis, Christian and Ulm, Gerhard and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation}, series = {Emerging Lithographic Technologies XII}, volume = {6921}, booktitle = {Emerging Lithographic Technologies XII}, editor = {Schellenberg, Frank}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2008, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Metrology of EUV masks by EUV-scatterometry and finite element analysis}, series = {Photomask and Next-Generation Lithography Mask Technology XV}, volume = {7028}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Horiuchi, Toshiyuki}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Evanschitzky, Peter and Erdmann, Andreas}, title = {Benchmark of rigorous methods for electromagnetic field simulation}, series = {Photomask Technology}, volume = {7122}, booktitle = {Photomask Technology}, editor = {Kawahira, H. and Zurbrick, L. S.}, publisher = {Proc. SPIE}, doi = {10.1117/12.801248}, pages = {71221}, year = {2008}, language = {en} } @inproceedings{ZschiedrichBurgerSchaedleetal.2008, author = {Zschiedrich, Lin and Burger, Sven and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {A rigorous finite-element domain decomposition method for electromagnetic near field simulations}, series = {Optical Microlithography XXI}, volume = {6924}, booktitle = {Optical Microlithography XXI}, editor = {Levinson, Harry and Dusa, Mircea}, publisher = {SPIE}, doi = {10.1117/12.771989}, year = {2008}, language = {en} } @incollection{PomplunZschiedrichKloseetal., author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite Element Simulation of Radiation Losses in Photonic Crystal Fibers}, series = {Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials}, booktitle = {Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials}, publisher = {Wiley-VCH}, doi = {10.1002/9783527621880.ch17}, pages = {313 -- 331}, language = {en} } @inproceedings{ScholzeLaubisDerschetal.2007, author = {Scholze, Frank and Laubis, Christian and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, pages = {66171A}, year = {2007}, language = {en} } @article{PearceWiederheckerPoultonetal.2007, author = {Pearce, G. J. and Wiederhecker, G. S. and Poulton, Christopher G. and Burger, Sven and Russell, P. St. J.}, title = {Models for guidance in kagome-structured hollow-core photonic crystal fibres}, series = {Optics Express}, volume = {15}, journal = {Optics Express}, doi = {10.1364/OE.15.012680}, pages = {12680}, year = {2007}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2007, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Finite element analysis of EUV lithography}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726156}, pages = {661718}, year = {2007}, language = {en} }