@misc{SchaedleZschiedrichBurgeretal., author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures}, doi = {/10.1016/j.jcp.2007.04.017}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-8984}, number = {06-04}, abstract = {We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.}, language = {en} } @article{BodermannBuhrDanzebrinketal.2011, author = {Bodermann, Bernd and Buhr, Egbert and Danzebrink, Hans-Ulrich and B{\"a}r, Markus and Scholze, Frank and Krumrey, Michael and Wurm, Matthias and Klapetek, Petr and Hansen, Poul-Erik and Korpelainen, Virpi and van Veghel, Marijn and Yacoot, Andrew and Siitonen, Samuli and El Gawhary, Omar and Burger, Sven and Saastamoinen, Toni}, title = {Joint Research on Scatterometry and AFM Wafer Metrology}, series = {AIP Conference Proceedings}, volume = {1395}, journal = {AIP Conference Proceedings}, number = {1}, publisher = {AIP}, doi = {10.1063/1.3657910}, pages = {319 -- 323}, year = {2011}, language = {en} } @inproceedings{BodermannHansenBurgeretal.2012, author = {Bodermann, Bernd and Hansen, Poul-Erik and Burger, Sven and Henn, Mark-Alexander and Gross, Hermann and B{\"a}r, Markus and Scholze, Frank and Endres, Johannes and Wurm, Matthias}, title = {First steps towards a scatterometry reference standard}, series = {Proc. SPIE}, volume = {8466}, booktitle = {Proc. SPIE}, doi = {10.1117/12.929903}, pages = {84660E}, year = {2012}, language = {en} } @article{Burger2009, author = {Burger, Sven}, title = {Simulation method improves accuracy for optical metrology and nanooptics design}, series = {SPIE Newsroom}, journal = {SPIE Newsroom}, doi = {10.1117/2.1200905.1629}, year = {2009}, language = {en} } @article{BabichevaVergelesVorobevetal.2012, author = {Babicheva, Viktoriia E. and Vergeles, Sergey S. and Vorobev, Petr E. and Burger, Sven}, title = {Localized surface plasmon modes in a system of two interacting metallic cylinders}, series = {J. Opt. Soc. Am. B}, volume = {29}, journal = {J. Opt. Soc. Am. B}, number = {6}, doi = {10.1364/JOSAB.29.001263}, pages = {1263 -- 1269}, year = {2012}, language = {en} } @article{BethgeSteinmeyerBurgeretal.2009, author = {Bethge, Jens and Steinmeyer, G{\"u}nter and Burger, Sven and Lederer, Falk and Iliew, Rumen}, title = {Guiding properties of chirped photonic crystal fibers}, series = {Journal of Lightwave Technology}, volume = {27}, journal = {Journal of Lightwave Technology}, doi = {10.1109/JLT.2009.2021583}, pages = {1698}, year = {2009}, language = {en} } @article{BlomeMcPeakBurgeretal.2014, author = {Blome, Mark and McPeak, Kevin and Burger, Sven and Schmidt, Frank and Norris, David}, title = {Back-reflector design in thin-film silicon solar cells by rigorous 3D light propagation modeling}, series = {COMPEL: Int. J. Comput. Mathem. Electr. Electron. Eng.}, volume = {33}, journal = {COMPEL: Int. J. Comput. Mathem. Electr. Electron. Eng.}, number = {4}, doi = {10.1108/COMPEL-12-2012-0367}, pages = {1282 -- 1295}, year = {2014}, language = {en} } @incollection{BurgerKloseSchaedleetal.2006, author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Adaptive FEM solver for the computation of electromagnetic eigenmodes in 3D photonic crystal structures}, series = {Scientific Computing in Electrical Engineering}, booktitle = {Scientific Computing in Electrical Engineering}, publisher = {Springer Verlag}, doi = {10.1007/978-3-540-32862-9_24}, pages = {169 -- 175}, year = {2006}, language = {en} } @inproceedings{BurgerKleemannZschiedrichetal.2009, author = {Burger, Sven and Kleemann, B. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures}, series = {Microtechnologies for the New Millenium}, volume = {7366}, booktitle = {Microtechnologies for the New Millenium}, publisher = {Proc. SPIE}, doi = {10.1117/12.822828}, pages = {736621}, year = {2009}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Nguyen, H. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Rigorous Simulation of 3D Masks}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, pages = {63494Z}, year = {2006}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2005, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Gao, W. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation}, series = {Photomask Technology}, volume = {5992}, booktitle = {Photomask Technology}, editor = {Weed, J. and Martin, P.}, publisher = {Proc. SPIE}, doi = {10.1117/12.631696}, pages = {378 -- 389}, year = {2005}, language = {en} } @inproceedings{BurgerLockauZschiedrichetal.2009, author = {Burger, Sven and Lockau, D. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-element simulations of light propagation through subwavelength apertures in metal films}, series = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {59}, year = {2009}, language = {en} } @incollection{BurgerPomplunSchmidt2012, author = {Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Finite Element Methods for Computational Nano-optics}, series = {Encyclopedia of Nanotechnology}, booktitle = {Encyclopedia of Nanotechnology}, editor = {Bhushan, B.}, publisher = {Springer Netherlands}, doi = {10.1007/978-90-481-9751-4_17}, pages = {837 -- 843}, year = {2012}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2003, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems}, series = {Dig. LEOS/IEEE 2003 Summer Topicals}, booktitle = {Dig. LEOS/IEEE 2003 Summer Topicals}, doi = {10.1109/LEOSST.2003.1224282}, pages = {75}, year = {2003}, language = {en} } @inproceedings{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWB7}, pages = {IWB7}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM simulation of resonances in low-Q cavities for plasmon lasers}, series = {International Workshop on Photonic Nanomaterials}, booktitle = {International Workshop on Photonic Nanomaterials}, editor = {Jena, Friedrich-Schiller-Universit{\"a}t}, isbn = {978-3-00-031358-5}, pages = {36}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical investigation of optical resonances in circular grating resonators}, series = {Silicon Photonics V}, volume = {7606}, booktitle = {Silicon Photonics V}, publisher = {Proc. SPIE}, doi = {10.1117/12.842061}, pages = {760610}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides}, series = {Photonic and Phononic Crystal Materials and Devices X}, volume = {7609}, booktitle = {Photonic and Phononic Crystal Materials and Devices X}, publisher = {Proc. SPIE}, doi = {10.1117/12.841867}, pages = {76091Q}, year = {2010}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, series = {Photomask Technology}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} } @inproceedings{BurgerSchaedleZschiedrichetal.2006, author = {Burger, Sven and Sch{\"a}dle, Achim and Zschiedrich, Lin and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, series = {Nanophotonics}, volume = {6195}, booktitle = {Nanophotonics}, editor = {Andrews, David L. and Nunzi, Jean-Michel and Ostendorf, Andreas}, publisher = {Proc. SPIE}, doi = {10.1117/12.662942}, pages = {72 -- 82}, year = {2006}, language = {en} }