@inproceedings{BeckerXavierPreideletal.2013, author = {Becker, Christiane and Xavier, Jolly and Preidel, Veit and Wyss, Philippe and Sontheimer, Tobias and Rech, Bernd and Probst, J{\"u}rgen and H{\"u}lsen, Christoph and L{\"o}chel, Bernd and Erko, Alexei and Burger, Sven and Schmidt, Frank and Back, Franziska and Rudigier-Voigt, Eveline}, title = {Nanophotonic light trapping in polycrystalline silicon thin-film solar cells using periodically nanoimprint-structured glass substrates}, volume = {8824}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2023871}, pages = {88240D}, year = {2013}, language = {en} } @article{ArellanoMingaleevKoltchanovetal.2013, author = {Arellano, Cristina and Mingaleev, Sergei F. and Koltchanov, Igor and Richter, Andre and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Efficient design of photonic integrated circuits (PICs) by combining device- and circuit- level simulation tools}, volume = {8627}, journal = {Proc. SPIE}, doi = {10.1117/12.2004378}, pages = {862711}, year = {2013}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Blome, Mark and Schmidt, Frank}, title = {Advanced finite-element methods for design and analysis of nano-optical structures: Applications}, volume = {8642}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1304.4356}, doi = {10.1117/12.2001094}, pages = {864205}, year = {2013}, language = {en} } @article{HammerschmidtLockauBurgeretal.2013, author = {Hammerschmidt, Martin and Lockau, Daniel and Burger, Sven and Schmidt, Frank and Schwanke, Christoph and Kirner, Simon and Calnan, Sonya and Stannowski, Bernd and Rech, Bernd}, title = {FEM-based optical modeling of silicon thin-film tandem solar cells with randomly textured interfaces in 3D}, volume = {8620}, journal = {Proc. SPIE}, doi = {10.1117/12.2001789}, pages = {86201H}, year = {2013}, language = {en} } @article{KewesSchellHenzeetal.2013, author = {Kewes, G{\"u}nter and Schell, Andreas W. and Henze, Rico and Schonfeld, Rolf S. and Burger, Sven and Busch, Kurt and Benson, Oliver}, title = {Design and numerical optimization of an easy-to-fabricate photon-to-plasmon coupler for quantum plasmonics}, volume = {102}, journal = {Applied Physics Letters}, doi = {10.1063/1.4790824}, pages = {051104}, year = {2013}, language = {en} } @article{MaesPetračekBurgeretal.2013, author = {Maes, Bjorn and Petr{\´a}ček, Jiř{\´i} and Burger, Sven and Kwiecien, Pavel and Luksch, Jaroslav and Richter, Ivan}, title = {Simulations of high-Q optical nanocavities with a gradual 1D bandgap}, volume = {21}, journal = {Opt. Express}, publisher = {OSA}, doi = {10.1364/OE.21.006794}, pages = {6794 -- 6806}, year = {2013}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Bodermann, Bernd}, title = {Fast simulation method for parameter reconstruction in optical metrology}, volume = {8681}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1304.4367}, doi = {10.1117/12.2011154}, pages = {868119}, year = {2013}, language = {en} } @article{ZschiedrichGreinerBurgeretal.2013, author = {Zschiedrich, Lin and Greiner, Horst and Burger, Sven and Schmidt, Frank}, title = {Numerical analysis of nanostructures for enhanced light extraction from OLEDs}, volume = {8641}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1304.4380}, doi = {10.1117/12.2001132}, pages = {86410B}, year = {2013}, language = {en} } @article{BockSkibinaFischeretal.2013, author = {Bock, Martin and Skibina, Julia and Fischer, Dorit and Bretschneider, Mario and Wedell, Reiner and Grunwald, R{\"u}diger and Burger, Sven and Beloglazov, Valentin and Steinmeyer, G{\"u}nter}, title = {Nanostructured fibers for sub-10 fs optical pulse delivery}, volume = {7}, journal = {Laser \& Photonics Reviews}, doi = {10.1002/lpor.201300006}, pages = {566 -- 570}, year = {2013}, language = {en} } @inproceedings{SkibinaBockFischeretal.2013, author = {Skibina, Julia and Bock, Martin and Fischer, Dorit and Grunwald, R{\"u}diger and Steinmeyer, G{\"u}nter and Wedell, Reiner and Bretschneider, Mario and Burger, Sven and Beloglazov, Valentin}, title = {10-fs fiber based pulse delivery}, booktitle = {Conference on Lasers, Applications, and Technologies (LAT)}, pages = {LWF5}, year = {2013}, language = {en} } @inproceedings{MenzelHebestreitMuehligetal.2013, author = {Menzel, Christoph and Hebestreit, Erik and M{\"u}hlig, Stefan and Burger, Sven and Rockstuhl, Carsten and Lederer, Falk and Pertsch, Thomas}, title = {Towards homogeneous magnetic metamaterials - a comprehensive multipole analysis}, booktitle = {Proc. META'13}, editor = {Zouhdi, Said and Al-Naimiy, Hamid}, isbn = {978-2-9545460-0-1}, pages = {502 -- 503}, year = {2013}, language = {en} } @inproceedings{HammerschmidtLockauBurgeretal.2012, author = {Hammerschmidt, Martin and Lockau, Daniel and Burger, Sven and Schmidt, Frank and Schwanke, Christoph and Kirner, Simon and Calnan, Sonya and Stannowski, Bernd and Rech, Bernd}, title = {3D optical modeling of thin-film a-Si/mc-Si tandem solar cells with random textured interfaces using FEM}, booktitle = {Renewable Energy and the Environment Optics and Photonics Congress}, publisher = {Optical Society of America}, doi = {10.1364/E2.2012.JM5A.15}, pages = {JM5A.15}, year = {2012}, language = {en} } @article{KatoBurgerScholze2012, author = {Kato, Akiko and Burger, Sven and Scholze, Frank}, title = {Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry}, volume = {51}, journal = {Appl. Optics}, arxiv = {http://arxiv.org/abs/1208.4220}, doi = {10.1364/AO.51.006457}, pages = {6457 -- 6464}, year = {2012}, language = {en} } @inproceedings{PetracekMaesBurgeretal.2012, author = {Petracek, Jiri and Maes, Bjorn and Burger, Sven and Luksch, Jaroslav and Kwiecien, Pavel and Richter, Ivan}, title = {Simulation of high-Q nanocavities with 1D photonic gap}, booktitle = {Transparent Optical Networks (ICTON)}, publisher = {IEEE}, doi = {10.1109/ICTON.2012.6253762}, pages = {1 -- 4}, year = {2012}, language = {en} } @inproceedings{PetracekLukschMaesetal.2012, author = {Petracek, Jiri and Luksch, Jaroslav and Maes, Bjorn and Burger, Sven and Kwiecien, Pavel and Richter, Ivan}, title = {Simulation of photonic crystal nanocavities using a bidirectional eigenmode propagation algorithm: a comparative study}, booktitle = {Micro- and nanophotonic materials and devices}, editor = {Ferrari, M. and Marciniak, M. and Righini, G. and Szoplik, T. and Varas, S.}, publisher = {IFN-CNR, Trento, Italy}, isbn = {9788377980200}, pages = {109 -- 112}, year = {2012}, language = {en} } @inproceedings{SchlosserSchothBurgeretal.2012, author = {Schlosser, Felix and Schoth, Mario and Burger, Sven and Schmidt, Frank and Knorr, Andreas and Mukamel, Shaul and Richter, Marten}, title = {Coherent Nonlinear Spectroscopy with Spatiotemporally Controlled Fields}, booktitle = {CLEO/QELS}, publisher = {Optical Society of America}, doi = {10.1364/QELS.2012.QF3D.6}, pages = {QF3D.6}, year = {2012}, language = {en} } @inproceedings{SchlosserSchothHiremathetal.2012, author = {Schlosser, Felix and Schoth, Mario and Hiremath, Kirankumar and Burger, Sven and Schmidt, Frank and Knorr, Andreas and Mukamel, Shaul and Richter, Marten}, title = {Combining nanooptical fields and coherent spectroscopy on systems with delocalized excitons}, volume = {8260}, booktitle = {Proc. SPIE}, doi = {10.1117/12.906671}, pages = {82601V}, year = {2012}, language = {en} } @article{RichterSchlosserSchothetal.2012, author = {Richter, Marten and Schlosser, Felix and Schoth, Mario and Burger, Sven and Schmidt, Frank and Knorr, Andreas and Mukamel, Shaul}, title = {Reconstruction of the wave functions of coupled nanoscopic emitters using a coherent optical technique}, volume = {86}, journal = {Phys. Rev. B}, arxiv = {http://arxiv.org/abs/1201.1765}, doi = {10.1103/PhysRevB.86.085308}, pages = {085308}, year = {2012}, language = {en} } @inproceedings{RozovaPomplunZschiedrichetal.2012, author = {Rozova, Maria and Pomplun, Jan and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven}, title = {3D finite element simulation of optical modes in VCSELs}, volume = {8255}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1111.4393}, doi = {10.1117/12.906372}, pages = {82550K}, year = {2012}, language = {en} } @inproceedings{PomplunWenzelBurgeretal.2012, author = {Pomplun, Jan and Wenzel, Hans and Burger, Sven and Zschiedrich, Lin and Rozova, Maria and Schmidt, Frank and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Erbert, G{\"o}tz}, title = {Thermo-optical simulation of high-power diode lasers}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.909330}, pages = {825510}, year = {2012}, language = {en} } @inproceedings{ZschiedrichGreinerPomplunetal.2012, author = {Zschiedrich, Lin and Greiner, Horst and Pomplun, Jan and Hammerschmidt, Martin and Burger, Sven and Schmidt, Frank}, title = {FEM simulations of light extraction from nanostructured organic light-emitting diodes}, booktitle = {Renewable Energy and the Environment Optics and Photonics Congress}, publisher = {Optical Society of America}, doi = {10.1364/SOLED.2012.LT2B.5}, pages = {LT2B.5}, year = {2012}, language = {en} } @article{YanLemmensAhrensetal.2012, author = {Yan, Hong-Dan and Lemmens, Peter and Ahrens, Johannes and Br{\"o}ring, Martin and Burger, Sven and Daum, Winfried and Lilienkamp, Gerhard and Korte, Sandra and Lak, Aidin and Schilling, Meinhard}, title = {High-density array of Au nanowires coupled by plasmon modes}, volume = {61}, journal = {Acta Phys. Sin.}, number = {23}, doi = {10.7498/aps.61.237105}, pages = {237105}, year = {2012}, language = {en} } @inproceedings{TyminskiPopescuBurgeretal.2012, author = {Tyminski, Jacek and Popescu, Raluca and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin and Matsuyama, Tomoyuki and Noda, Tomoya}, title = {Finite element models of lithographic mask topography}, volume = {8326}, booktitle = {Proc. SPIE}, editor = {Conley, W.}, doi = {10.1117/12.916957}, pages = {83261B}, year = {2012}, language = {en} } @article{BabichevaVergelesVorobevetal.2012, author = {Babicheva, Viktoriia E. and Vergeles, Sergey S. and Vorobev, Petr E. and Burger, Sven}, title = {Localized surface plasmon modes in a system of two interacting metallic cylinders}, volume = {29}, journal = {J. Opt. Soc. Am. B}, number = {6}, arxiv = {http://arxiv.org/abs/1204.5773}, doi = {10.1364/JOSAB.29.001263}, pages = {1263 -- 1269}, year = {2012}, language = {en} } @inproceedings{BockSkibinaFischeretal.2012, author = {Bock, Martin and Skibina, Julia and Fischer, Dorit and Grunwald, R{\"u}diger and Burger, Sven and Beloglazov, Valentin and Steinmeyer, G{\"u}nter}, title = {10-fs pulse delivery through a fiber}, booktitle = {CLEO}, publisher = {Optical Society of America}, doi = {10.1364/CLEO_SI.2012.CTh3G.3}, pages = {CTh3G.3}, year = {2012}, language = {en} } @inproceedings{BodermannHansenBurgeretal.2012, author = {Bodermann, Bernd and Hansen, Poul-Erik and Burger, Sven and Henn, Mark-Alexander and Gross, Hermann and B{\"a}r, Markus and Scholze, Frank and Endres, Johannes and Wurm, Matthias}, title = {First steps towards a scatterometry reference standard}, volume = {8466}, booktitle = {Proc. SPIE}, doi = {10.1117/12.929903}, pages = {84660E}, year = {2012}, language = {en} } @incollection{BurgerPomplunSchmidt2012, author = {Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Finite Element Methods for Computational Nano-optics}, booktitle = {Encyclopedia of Nanotechnology}, editor = {Bhushan, B.}, publisher = {Springer Netherlands}, doi = {10.1007/978-90-481-9751-4_17}, pages = {837 -- 843}, year = {2012}, language = {en} } @inproceedings{PomplunBurgerRozovaetal.2011, author = {Pomplun, Jan and Burger, Sven and Rozova, Maria and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite element simulation of optical modes in VCSELs}, booktitle = {Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on}, doi = {10.1109/NUSOD.2011.6041170}, pages = {119 -- 120}, year = {2011}, language = {en} } @inproceedings{LockauZschiedrichBurgeretal.2011, author = {Lockau, D. and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Ruske, F. and Rech, Bernd}, title = {Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.874967}, pages = {79330M}, year = {2011}, language = {en} } @inproceedings{KleemannKurzHetzleretal.2011, author = {Kleemann, B. and Kurz, J. and Hetzler, J. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889364}, pages = {808309}, year = {2011}, language = {en} } @inproceedings{NeveOzPollokBurgeretal.2011, author = {Neve-Oz, Y. and Pollok, T. and Burger, Sven and Golosovsky, M. and Davidov, D.}, title = {Localized resonant states and transmission in a two- dimensional photonic quasicrystal}, volume = {1}, booktitle = {Proc. of the 5th International Conference on Applied Mathematics, Simulation, Modelling (ASM 'II), Corfu, 2011}, editor = {Mastorakis, N.}, isbn = {978-1-61804-016-9}, pages = {178 -- 182}, year = {2011}, language = {en} } @article{SchlosserSchothBurgeretal.2011, author = {Schlosser, Felix and Schoth, Mario and Burger, Sven and Schmidt, Frank and Knorr, Andreas and Mukamel, S. and Richter, Marten}, title = {Ultrafast nonlinear spectroscopy with spatially confined fields}, volume = {1398}, journal = {AIP Conference Proceedings}, publisher = {AIP}, doi = {10.1063/1.3644223}, pages = {94 -- 96}, year = {2011}, language = {en} } @inproceedings{SchmidtPomplunZschiedrichetal.2011, author = {Schmidt, Frank and Pomplun, Jan and Zschiedrich, Lin and Burger, Sven}, title = {Fast online simulation of 3D nanophotonic structures by the reduced basis method}, volume = {7941}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XV}, publisher = {Proc. SPIE}, doi = {10.1117/12.874726}, pages = {79410G}, year = {2011}, language = {en} } @inproceedings{PomplunBurgerZschiedrichetal.2011, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Reduced basis method for real-time inverse scatterometry}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889892}, pages = {808308}, year = {2011}, language = {en} } @article{ZhaoFrankBurgeretal.2011, author = {Zhao, J. and Frank, B. and Burger, Sven and Giessen, H.}, title = {Large-Area High-Quality Plasmonic Oligomers Fabricated by Angle-Controlled Colloidal Nanolithography}, volume = {5}, journal = {ACS Nano}, number = {11}, doi = {10.1021/nn203177s}, pages = {9009}, year = {2011}, language = {en} } @inproceedings{WongKangLeeetal.2011, author = {Wong, G. and Kang, M. and Lee, H. and Burger, Sven and Zschiedrich, Lin and Biancalana, F. and Russell, P.}, title = {Strongly Twisted Solid-Core PCF: A One-Dimensional Chiral Metamaterial}, booktitle = {Frontiers in Optics}, publisher = {Optical Society of America}, doi = {10.1364/FIO.2011.FMG3}, pages = {FMG3}, year = {2011}, language = {en} } @inproceedings{WenzelCrumpEkhteraeietal.2011, author = {Wenzel, Hans and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Erbert, G{\"o}tz}, title = {Theoretical and experimental analysis of the lateral modes of high-power broad-area lasers}, booktitle = {Numerical Simulation of Optoelectronic Devices}, doi = {10.1109/NUSOD.2011.6041183}, pages = {143 -- 144}, year = {2011}, language = {en} } @article{BodermannBuhrDanzebrinketal.2011, author = {Bodermann, Bernd and Buhr, Egbert and Danzebrink, Hans-Ulrich and B{\"a}r, Markus and Scholze, Frank and Krumrey, Michael and Wurm, Matthias and Klapetek, Petr and Hansen, Poul-Erik and Korpelainen, Virpi and van Veghel, Marijn and Yacoot, Andrew and Siitonen, Samuli and El Gawhary, Omar and Burger, Sven and Saastamoinen, Toni}, title = {Joint Research on Scatterometry and AFM Wafer Metrology}, volume = {1395}, journal = {AIP Conference Proceedings}, number = {1}, publisher = {AIP}, doi = {10.1063/1.3657910}, pages = {319 -- 323}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, editor = {Bodermann, Bernd}, publisher = {Proc. SPIE}, doi = {10.1117/12.889831}, pages = {80831B}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kato, Akiko and Laubis, Christian and Scholze, Frank}, title = {Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations}, volume = {8166}, booktitle = {Photomask Technology 2011}, publisher = {Proc. SPIE}, doi = {10.1117/12.896839}, pages = {81661Q}, year = {2011}, language = {en} } @inproceedings{BurgerPomplunSchmidtetal.2011, author = {Burger, Sven and Pomplun, Jan and Schmidt, Frank and Zschiedrich, Lin}, title = {Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.875044}, pages = {79330T}, year = {2011}, language = {en} } @article{GanselWegenerBurgeretal.2010, author = {Gansel, J. and Wegener, M. and Burger, Sven and Linden, S.}, title = {Gold helix photonic metamaterials: a numerical parameter study}, volume = {18}, journal = {Opt. Express}, doi = {10.1364/OE.18.001059}, pages = {1059 -- 1069}, year = {2010}, language = {en} } @article{NeveOzPollokBurgeretal.2010, author = {Neve-Oz, Y. and Pollok, T. and Burger, Sven and Golosovsky, M. and Davidov, D.}, title = {Resonant Transmission of Electromagnetic Waves through 2D Photonic Quasicrystals}, volume = {107}, journal = {J. Appl. Phys.}, doi = {10.1063/1.3329542}, pages = {063105}, year = {2010}, language = {en} } @article{NeveOzPollokBurgeretal.2010, author = {Neve-Oz, Y. and Pollok, T. and Burger, Sven and Golosovsky, M. and Lifshitz, R. and Davidov, D.}, title = {Negative Refraction and Omni Directionality in 2D Photonic Quasicrystal Superstructure}, volume = {1281}, journal = {AIP Conference Proceedings}, publisher = {AIP}, doi = {10.1063/1.3498134}, pages = {1622}, year = {2010}, language = {en} } @article{PomplunBurgerSchmidtetal.2010, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Schliwa, Andrei and Bimberg, Dieter and Pietrzak, Agnieszka and Wenzel, Hans and Erbert, G{\"o}tz}, title = {Finite element simulation of the optical modes of semiconductor lasers}, volume = {247}, journal = {Phys. Status Solidi B}, doi = {10.1002/pssb.200945451}, pages = {846 -- 853}, year = {2010}, language = {en} } @inproceedings{PomplunSchmidtBurgeretal.2010, author = {Pomplun, Jan and Schmidt, Frank and Burger, Sven and Zschiedrich, Lin}, title = {Adaptive Reduced Basis Method for Optical Scattering Problems}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWD4}, pages = {IWD4}, year = {2010}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2010, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite element method for accurate 3D simulation of plasmonic waveguides}, volume = {7604}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XIV}, publisher = {Proc. SPIE}, doi = {10.1117/12.841995}, pages = {76040F}, year = {2010}, language = {en} } @article{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM Simulation of Plasmon Laser Resonances}, volume = {1281}, journal = {AIP Conference Proceedings}, publisher = {AIP}, doi = {10.1063/1.3498131}, pages = {1613 -- 1616}, year = {2010}, language = {en} } @inproceedings{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWB7}, pages = {IWB7}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM simulation of resonances in low-Q cavities for plasmon lasers}, booktitle = {International Workshop on Photonic Nanomaterials}, editor = {Jena, Friedrich-Schiller-Universit{\"a}t}, isbn = {978-3-00-031358-5}, pages = {36}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical investigation of optical resonances in circular grating resonators}, volume = {7606}, booktitle = {Silicon Photonics V}, publisher = {Proc. SPIE}, doi = {10.1117/12.842061}, pages = {760610}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides}, volume = {7609}, booktitle = {Photonic and Phononic Crystal Materials and Devices X}, publisher = {Proc. SPIE}, doi = {10.1117/12.841867}, pages = {76091Q}, year = {2010}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} } @inproceedings{SkibinaIliewBethgeetal.2009, author = {Skibina, Julia and Iliew, Rumen and Bethge, Jens and Bock, Martin and Fischer, Dorit and Beloglazov, Valentin and Wedell, Reiner and Burger, Sven and Steinmeyer, G{\"u}nter}, title = {A chirped photonic crystal fiber for high-fidelity guiding of sub-100 fs pluses}, booktitle = {CLEO/QELS}, doi = {10.1364/CLEO.2009.CMHH1}, pages = {CMHH1}, year = {2009}, language = {en} } @inproceedings{HoffmannHafnerLeidenbergeretal.2009, author = {Hoffmann, Johannes and Hafner, Christian and Leidenberger, P. and Hesselbarth, J. and Burger, Sven}, title = {Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.828036}, pages = {73900J}, year = {2009}, language = {en} } @article{DeckerBurgerLindenetal.2009, author = {Decker, Manuel and Burger, Sven and Linden, S. and Wegener, M.}, title = {Magnetization waves in split-ring-resonator arrays}, volume = {80}, journal = {Phys. Rev. B}, number = {19}, doi = {10.1103/PhysRevB.80.193102}, pages = {193102}, year = {2009}, language = {en} } @article{LockauZschiedrichBurger2009, author = {Lockau, D. and Zschiedrich, Lin and Burger, Sven}, title = {Accurate simulation of light transmission through subwavelength apertures in metal films}, volume = {11}, journal = {J. Opt. A}, arxiv = {http://arxiv.org/abs/0902.2862}, doi = {10.1088/1464-4258/11/11/114013}, pages = {114013}, year = {2009}, language = {en} } @inproceedings{LockauZschiedrichSchmidtetal.2009, author = {Lockau, D. and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven and Rech, Bernd}, title = {Efficient simulation of plasmonic structures for solar cells}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {48}, year = {2009}, language = {en} } @article{KarlKettnerBurgeretal.2009, author = {Karl, M. and Kettner, Benjamin and Burger, Sven and Schmidt, Frank and Kalt, H. and Hetterich, M.}, title = {Dependencies of micro-pillar cavity quality factors calculated with finite element methods}, volume = {17}, journal = {Optics Express}, doi = {10.1364/OE.17.001144}, pages = {1144}, year = {2009}, language = {en} } @article{NeveOzPollokBurgeretal.2009, author = {Neve-Oz, Y. and Pollok, T. and Burger, Sven and Golosovsky, M. and Davidov, D.}, title = {Fast Light and Focusing in 2D Photonic Quasicrystals}, volume = {5}, journal = {PIERS Online}, doi = {10.2529/PIERS081223080021}, pages = {451}, year = {2009}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for computational lithography}, volume = {7488}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.829639}, pages = {74882B}, year = {2009}, language = {en} } @inproceedings{SkibinaIliewBethgeetal.2009, author = {Skibina, Julia and Iliew, Rumen and Bethge, Jens and Bock, Martin and Fischer, Dorit and Beloglazov, Valentin and Wedell, Reiner and Burger, Sven and Steinmeyer, G{\"u}nter}, title = {A chirped photonic crystal fiber for ultrashort laser pulse delivery}, booktitle = {CLEO Europe - EQEC}, doi = {10.1109/CLEOE-EQEC.2009.5196579}, year = {2009}, language = {en} } @article{BethgeSteinmeyerBurgeretal.2009, author = {Bethge, Jens and Steinmeyer, G{\"u}nter and Burger, Sven and Lederer, Falk and Iliew, Rumen}, title = {Guiding properties of chirped photonic crystal fibers}, volume = {27}, journal = {Journal of Lightwave Technology}, doi = {10.1109/JLT.2009.2021583}, pages = {1698}, year = {2009}, language = {en} } @article{Burger2009, author = {Burger, Sven}, title = {Simulation method improves accuracy for optical metrology and nanooptics design}, journal = {SPIE Newsroom}, doi = {10.1117/2.1200905.1629}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrich2009, author = {Burger, Sven and Zschiedrich, Lin}, title = {Numerical Investigation of Silicon-on-Insulator 1D Photonic Crystal Microcavities}, volume = {1176}, booktitle = {Theoretical and computational nanooptics}, editor = {Chigrin, Dmitry}, publisher = {AIP}, doi = {10.1063/1.3253915}, pages = {43 -- 45}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2009, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kettner, Benjamin and Lockau, D.}, title = {3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827543}, pages = {73900H}, year = {2009}, language = {en} } @inproceedings{BurgerLockauZschiedrichetal.2009, author = {Burger, Sven and Lockau, D. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-element simulations of light propagation through subwavelength apertures in metal films}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {59}, year = {2009}, language = {en} } @inproceedings{BurgerKleemannZschiedrichetal.2009, author = {Burger, Sven and Kleemann, B. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures}, volume = {7366}, booktitle = {Microtechnologies for the New Millenium}, publisher = {Proc. SPIE}, doi = {10.1117/12.822828}, pages = {736621}, year = {2009}, language = {en} } @inproceedings{ScholzeLaubisUlmetal.2008, author = {Scholze, Frank and Laubis, Christian and Ulm, Gerhard and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation}, volume = {6921}, booktitle = {Emerging Lithographic Technologies XII}, editor = {Schellenberg, Frank}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2008, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Metrology of EUV masks by EUV-scatterometry and finite element analysis}, volume = {7028}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Horiuchi, Toshiyuki}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{SchmidtBurgerPomplunetal.2008, author = {Schmidt, Frank and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin}, title = {Advanced FEM analysis of optical waveguides: algorithms and applications}, volume = {6896}, booktitle = {Integrated Optics}, editor = {Greiner, Christoph and W{\"a}chter, Christoph}, publisher = {SPIE}, doi = {10.1117/12.765720}, pages = {689602}, year = {2008}, language = {en} } @inproceedings{ZschiedrichBurgerSchaedleetal.2008, author = {Zschiedrich, Lin and Burger, Sven and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {A rigorous finite-element domain decomposition method for electromagnetic near field simulations}, volume = {6924}, booktitle = {Optical Microlithography XXI}, editor = {Levinson, Harry and Dusa, Mircea}, publisher = {SPIE}, doi = {10.1117/12.771989}, year = {2008}, language = {en} } @incollection{PomplunZschiedrichKloseetal.2008, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite Element Simulation of Radiation Losses in Photonic Crystal Fibers}, booktitle = {Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials}, publisher = {Wiley-VCH}, doi = {10.1002/9783527621880.ch17}, pages = {313 -- 331}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Evanschitzky, Peter and Erdmann, Andreas}, title = {Benchmark of rigorous methods for electromagnetic field simulation}, volume = {7122}, booktitle = {Photomask Technology}, editor = {Kawahira, H. and Zurbrick, L. S.}, publisher = {Proc. SPIE}, doi = {10.1117/12.801248}, pages = {71221}, year = {2008}, language = {en} } @incollection{BurgerZschiedrichKettneretal.2008, author = {Burger, Sven and Zschiedrich, Lin and Kettner, Benjamin and Schmidt, Frank}, title = {FEM simulation of light scattering by nonspherical objects}, booktitle = {Mie Theory 1908 - 2008}, editor = {Hergert, W. and Wriedt, T.}, publisher = {Universit{\"a}t Bremen}, pages = {82 -- 83}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, doi = {10.1364/IPNRA.2008.ITuE4}, pages = {ITuE4}, year = {2008}, language = {en} } @article{DollingKleinWegeneretal.2007, author = {Dolling, G. and Klein, M. and Wegener, M. and Sch{\"a}dle, Achim and Burger, Sven and Linden, S.}, title = {Negative beam displacement for negative-index photonic metamaterials}, volume = {15}, journal = {Optics Express}, number = {21}, doi = {10.1364/OE.15.014219}, pages = {14219 -- 14227}, year = {2007}, language = {en} } @article{PearceWiederheckerPoultonetal.2007, author = {Pearce, G. J. and Wiederhecker, G. S. and Poulton, Christopher G. and Burger, Sven and Russell, P. St. J.}, title = {Models for guidance in kagome-structured hollow-core photonic crystal fibres}, volume = {15}, journal = {Optics Express}, doi = {10.1364/OE.15.012680}, pages = {12680}, year = {2007}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2007, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Finite element analysis of EUV lithography}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726156}, pages = {661718}, year = {2007}, language = {en} } @article{SchaedleZschiedrichBurgeretal.2007, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations}, volume = {226}, journal = {J. Comput. Phys.}, doi = {10.1016/j.jcp.2007.04.017}, pages = {477 -- 493}, year = {2007}, language = {en} } @article{PomplunBurgerZschiedrichetal.2007, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Adaptive finite element method for simulation of optical nano structures}, volume = {244}, journal = {Phys. Status Solidi B}, arxiv = {http://arxiv.org/abs/0711.2149}, doi = {10.1002/pssb.200743192}, pages = {3419 -- 3434}, year = {2007}, language = {en} } @inproceedings{PomplunHolzloehnerBurgeretal.2007, author = {Pomplun, Jan and Holzl{\"o}hner, Ronald and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM investigation of leaky modes in hollow core photonic crystal fibers}, volume = {6480}, booktitle = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, editor = {Adibi, Ali and Scherer, Axel and Lin, Shawn-Yu}, pages = {64800M}, year = {2007}, language = {en} } @article{PomplunZschiedrichKloseetal.2007, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite element simulation of radiation losses in photonic crystal fibers}, volume = {204}, journal = {phys. stat. sol. (a)}, number = {11}, doi = {10.1002/pssa.200776414}, pages = {3822 -- 3837}, year = {2007}, language = {en} } @inproceedings{ScholzeLaubisDerschetal.2007, author = {Scholze, Frank and Laubis, Christian and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, pages = {66171A}, year = {2007}, language = {en} } @inproceedings{ZschiedrichBurgerPomplunetal.2007, author = {Zschiedrich, Lin and Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Goal oriented adaptive finite element method for precise simulation of optical components}, volume = {6475}, booktitle = {Proc. SPIE, Integrated Optics}, editor = {Sidorin, Y. and Waechter, Ch.}, pages = {64750H}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and Henkel, Thomas and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726236}, pages = {66170V}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {EMF Simulations of Isolated and Periodic 3D Photomask Patterns}, volume = {6730}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, pages = {6630}, year = {2007}, language = {en} } @misc{SchaedleZschiedrichBurgeretal.2006, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures}, doi = {/10.1016/j.jcp.2007.04.017}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-8984}, number = {06-04}, year = {2006}, abstract = {We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.}, language = {en} } @article{HolzloehnerBurgerRobertsetal.2006, author = {Holzl{\"o}hner, Ronald and Burger, Sven and Roberts, P. and Pomplun, Jan}, title = {Efficient optimization of hollow-core photonic crystal fiber design using the finite-element method}, volume = {1}, journal = {J. Eur. Opt. Soc.-Rapid}, doi = {10.2971/jeos.2006.06011}, pages = {06011}, year = {2006}, language = {en} } @article{DollingWegenerSchaedleetal.2006, author = {Dolling, G. and Wegener, M. and Sch{\"a}dle, Achim and Burger, Sven and Linden, S.}, title = {Observation of magnetization waves in negative-index photonic metamaterials}, volume = {89}, journal = {Appl. Phys. Lett.}, doi = {10.1063/1.2403905}, pages = {231118}, year = {2006}, language = {en} } @article{LindenEnkrichDollingetal.2006, author = {Linden, S. and Enkrich, Christian and Dolling, G. and Klein, M. and Zhou, J. and Koschny, T. and Soukoulis, C. and Burger, Sven and Schmidt, Frank and Wegener, M.}, title = {Photonic metamaterials: Magnetism at Optical Frequencies}, volume = {12}, journal = {IEEE Journal of Selected Topics in Quantum Electronics}, number = {6}, doi = {10.1109/JSTQE.2006.880600}, pages = {1097 -- 1105}, year = {2006}, language = {en} } @article{MichaelisWaechterBurgeretal.2006, author = {Michaelis, D. and W{\"a}chter, Christoph and Burger, Sven and Zschiedrich, Lin and Br{\"a}uer, Andreas}, title = {Micro-optically assisted high index waveguide coupling}, volume = {45}, journal = {Appl. Opt.}, doi = {10.1364/AO.45.001831}, pages = {1831 -- 1838}, year = {2006}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2006, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin and Scholze, Frank}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, doi = {10.1117/12.686828}, pages = {63493D}, year = {2006}, language = {en} } @inproceedings{ZschiedrichBurgerKettneretal.2006, author = {Zschiedrich, Lin and Burger, Sven and Kettner, Benjamin and Schmidt, Frank}, title = {Advanced Finite Element Method for Nano-Resonators}, volume = {6115}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/physics/0601025}, doi = {10.1117/12.646252}, pages = {611515}, year = {2006}, language = {en} } @inproceedings{ZschiedrichMaerzBurgeretal.2006, author = {Zschiedrich, Lin and M{\"a}rz, Reinhard and Burger, Sven and Schmidt, Frank}, title = {Efficient 3D Finite Element Simulation of Fiber-Chip Coupling}, booktitle = {Integrated Photonics Research and Applications/Nanophotonics}, doi = {10.1364/IPRA.2006.ITuF1}, pages = {ITuF1}, year = {2006}, language = {en} } @inproceedings{BurgerZschiedrichSchaedleetal.2006, author = {Burger, Sven and Zschiedrich, Lin and Sch{\"a}dle, Achim and Klose, Roland and Kettner, Benjamin and Pomplun, Jan and Pollok, T. and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, booktitle = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, year = {2006}, language = {en} } @inproceedings{BurgerSchaedleZschiedrichetal.2006, author = {Burger, Sven and Sch{\"a}dle, Achim and Zschiedrich, Lin and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, volume = {6195}, booktitle = {Nanophotonics}, editor = {Andrews, David L. and Nunzi, Jean-Michel and Ostendorf, Andreas}, publisher = {Proc. SPIE}, doi = {10.1117/12.662942}, pages = {72 -- 82}, year = {2006}, language = {en} } @incollection{BurgerKloseSchaedleetal.2006, author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Adaptive FEM solver for the computation of electromagnetic eigenmodes in 3D photonic crystal structures}, booktitle = {Scientific Computing in Electrical Engineering}, publisher = {Springer Verlag}, doi = {10.1007/978-3-540-32862-9_24}, pages = {169 -- 175}, year = {2006}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Nguyen, H. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Rigorous Simulation of 3D Masks}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, pages = {63494Z}, year = {2006}, language = {en} } @article{EnkrichWegenerLindenetal.2005, author = {Enkrich, Christian and Wegener, M. and Linden, S. and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Zhou, C. and Koschny, T. and Soukoulis, C.}, title = {Magnetic metamaterials at telecommunication and visible frequencies}, volume = {95}, journal = {Phys. Rev. Lett.}, arxiv = {http://arxiv.org/abs/cond-mat/0504774}, doi = {10.1103/PhysRevLett.95.203901}, pages = {203901}, year = {2005}, language = {en} }