@misc{BurgerKloseSchaedleetal., author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Zschiedrich, Lin}, title = {HelmPole - A finite element solver for scattering problems on unbounded domains: Implementation based on PML}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-7609}, number = {03-38}, abstract = {The solution of scattering problems described by the Helmholtz equation on unbounded domains is of importance for a wide variety of applications, for example in electromagnetics and acoustics. An implementation of a solver for scattering problems based on the programming language Matlab is introduced. The solver relies on the finite-element-method and on the perfectly-matched-layer-method, which allows for the simulation of scattering problems on complex geometries surrounded by inhomogeneous exterior domains. This report gives a number of detailed examples and can be understood as a user manual to the freely accessible code of the solver HelmPole.}, language = {en} } @misc{SchaedleZschiedrichBurgeretal., author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures}, doi = {/10.1016/j.jcp.2007.04.017}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-8984}, number = {06-04}, abstract = {We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.}, language = {en} } @article{BodermannBuhrDanzebrinketal.2011, author = {Bodermann, Bernd and Buhr, Egbert and Danzebrink, Hans-Ulrich and B{\"a}r, Markus and Scholze, Frank and Krumrey, Michael and Wurm, Matthias and Klapetek, Petr and Hansen, Poul-Erik and Korpelainen, Virpi and van Veghel, Marijn and Yacoot, Andrew and Siitonen, Samuli and El Gawhary, Omar and Burger, Sven and Saastamoinen, Toni}, title = {Joint Research on Scatterometry and AFM Wafer Metrology}, series = {AIP Conference Proceedings}, volume = {1395}, journal = {AIP Conference Proceedings}, number = {1}, publisher = {AIP}, doi = {10.1063/1.3657910}, pages = {319 -- 323}, year = {2011}, language = {en} } @inproceedings{BodermannHansenBurgeretal.2012, author = {Bodermann, Bernd and Hansen, Poul-Erik and Burger, Sven and Henn, Mark-Alexander and Gross, Hermann and B{\"a}r, Markus and Scholze, Frank and Endres, Johannes and Wurm, Matthias}, title = {First steps towards a scatterometry reference standard}, series = {Proc. SPIE}, volume = {8466}, booktitle = {Proc. SPIE}, doi = {10.1117/12.929903}, pages = {84660E}, year = {2012}, language = {en} } @phdthesis{Burger2000, author = {Burger, Sven}, title = {Erzeugung und Untersuchung dunkler Solitonen in Bose-Einstein Kondensaten}, year = {2000}, language = {en} } @article{Burger2009, author = {Burger, Sven}, title = {Simulation method improves accuracy for optical metrology and nanooptics design}, series = {SPIE Newsroom}, journal = {SPIE Newsroom}, doi = {10.1117/2.1200905.1629}, year = {2009}, language = {en} } @article{BabichevaVergelesVorobevetal.2012, author = {Babicheva, Viktoriia E. and Vergeles, Sergey S. and Vorobev, Petr E. and Burger, Sven}, title = {Localized surface plasmon modes in a system of two interacting metallic cylinders}, series = {J. Opt. Soc. Am. B}, volume = {29}, journal = {J. Opt. Soc. Am. B}, number = {6}, doi = {10.1364/JOSAB.29.001263}, pages = {1263 -- 1269}, year = {2012}, language = {en} } @article{BethgeSteinmeyerBurgeretal.2009, author = {Bethge, Jens and Steinmeyer, G{\"u}nter and Burger, Sven and Lederer, Falk and Iliew, Rumen}, title = {Guiding properties of chirped photonic crystal fibers}, series = {Journal of Lightwave Technology}, volume = {27}, journal = {Journal of Lightwave Technology}, doi = {10.1109/JLT.2009.2021583}, pages = {1698}, year = {2009}, language = {en} } @article{BlomeMcPeakBurgeretal.2014, author = {Blome, Mark and McPeak, Kevin and Burger, Sven and Schmidt, Frank and Norris, David}, title = {Back-reflector design in thin-film silicon solar cells by rigorous 3D light propagation modeling}, series = {COMPEL: Int. J. Comput. Mathem. Electr. Electron. Eng.}, volume = {33}, journal = {COMPEL: Int. J. Comput. Mathem. Electr. Electron. Eng.}, number = {4}, doi = {10.1108/COMPEL-12-2012-0367}, pages = {1282 -- 1295}, year = {2014}, language = {en} } @incollection{BurgerKloseSchaedleetal.2006, author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Adaptive FEM solver for the computation of electromagnetic eigenmodes in 3D photonic crystal structures}, series = {Scientific Computing in Electrical Engineering}, booktitle = {Scientific Computing in Electrical Engineering}, publisher = {Springer Verlag}, doi = {10.1007/978-3-540-32862-9_24}, pages = {169 -- 175}, year = {2006}, language = {en} }