@article{BodermannBuhrDanzebrinketal.2011, author = {Bodermann, Bernd and Buhr, Egbert and Danzebrink, Hans-Ulrich and B{\"a}r, Markus and Scholze, Frank and Krumrey, Michael and Wurm, Matthias and Klapetek, Petr and Hansen, Poul-Erik and Korpelainen, Virpi and van Veghel, Marijn and Yacoot, Andrew and Siitonen, Samuli and El Gawhary, Omar and Burger, Sven and Saastamoinen, Toni}, title = {Joint Research on Scatterometry and AFM Wafer Metrology}, series = {AIP Conference Proceedings}, volume = {1395}, journal = {AIP Conference Proceedings}, number = {1}, publisher = {AIP}, doi = {10.1063/1.3657910}, pages = {319 -- 323}, year = {2011}, language = {en} } @inproceedings{BodermannHansenBurgeretal.2012, author = {Bodermann, Bernd and Hansen, Poul-Erik and Burger, Sven and Henn, Mark-Alexander and Gross, Hermann and B{\"a}r, Markus and Scholze, Frank and Endres, Johannes and Wurm, Matthias}, title = {First steps towards a scatterometry reference standard}, series = {Proc. SPIE}, volume = {8466}, booktitle = {Proc. SPIE}, doi = {10.1117/12.929903}, pages = {84660E}, year = {2012}, language = {en} } @article{EndresBurgerWurmetal.2013, author = {Endres, Johannes and Burger, Sven and Wurm, Matthias and Bodermann, Bernd}, title = {Numerical investigations of the influence of different commonly applied approximations in scatterometry}, series = {Proc. SPIE}, volume = {8789}, journal = {Proc. SPIE}, doi = {10.1117/12.2022108}, pages = {878904}, year = {2013}, language = {en} } @inproceedings{AgcosBodermannBurgeretal., author = {Agcos, Emil and Bodermann, Bernd and Burger, Sven and Dai, Gaoliang and Endres, Johannes and Hansen, Poul-Erik and Nielson, Lars and Madsen, Morten and Heidenreich, Sebastian and Krumrey, Michael and Loechel, Bernd and Probst, J{\"u}rgen and Scholze, Frank and Soltwisch, Victor and Wurm, Matthias}, title = {Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing}, series = {Proc. SPIE}, volume = {9556}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2190409}, pages = {955610}, language = {en} } @article{FarchminHammerschmidtSchneideretal., author = {Farchmin, Nando and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Wurm, Matthias and Bodermann, Bernd and B{\"a}r, Markus and Heidenreich, Sebastian}, title = {Efficient Bayesian inversion for shape reconstruction of lithography masks}, series = {J. Micro/Nanolith. MEMS MOEMS}, volume = {19}, journal = {J. Micro/Nanolith. MEMS MOEMS}, doi = {10.1117/1.JMM.19.2.024001}, pages = {024001}, language = {en} }