TY - JOUR A1 - Andrle, Anna A1 - Hönicke, Philipp A1 - Gwalt, Grzegorz A1 - Schneider, Philipp-Immanuel A1 - Kayser, Yves A1 - Siewert, Frank A1 - Soltwisch, Victor T1 - GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures T2 - Proc. SPIE Y1 - 2021 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/8162 VL - 11611 SP - 116110R ER -