TY - CONF A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schädle, Achim A1 - Schmidt, Frank A2 - Levinson, Harry A2 - Dusa, Mircea T1 - A rigorous finite-element domain decomposition method for electromagnetic near field simulations T2 - Optical Microlithography XXI Y1 - 2008 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/2597 VL - 6924 PB - SPIE ER -