TY - JOUR A1 - Farchmin, Nando A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Wurm, Matthias A1 - Bär, Markus A1 - Heidenreich, Sebastian T1 - Efficient global sensitivity analysis for silicon line gratings using polynomial chaos T2 - Proc. SPIE Y1 - 2019 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/7388 VL - 11057 SP - 110570J ER -