@article{FarchminHammerschmidtSchneideretal.2019, author = {Nando Farchmin and Martin Hammerschmidt and Philipp-Immanuel Schneider and Matthias Wurm and Markus B{\"a}r and Sebastian Heidenreich}, title = {Efficient global sensitivity analysis for silicon line gratings using polynomial chaos}, journal = {Proc. SPIE}, volume = {11057}, pages = {110570J}, doi = {10.1117/12.2525978}, year = {2019}, }