@inproceedings{AgcosBodermannBurgeretal.2015, author = {Emil Agcos and Bernd Bodermann and Sven Burger and Gaoliang Dai and Johannes Endres and Poul-Erik Hansen and Lars Nielson and Morten Madsen and Sebastian Heidenreich and Michael Krumrey and Bernd Loechel and J{\"u}rgen Probst and Frank Scholze and Victor Soltwisch and Matthias Wurm}, title = {Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing}, booktitle = {Proc. SPIE}, volume = {9556}, pages = {955610}, doi = {10.1117/12.2190409}, year = {2015}, }