TY - JOUR A1 - Schnauber, Peter A1 - Schall, Johannes A1 - Bounouar, Samir A1 - Höhne, Theresa A1 - Park, Suk-In A1 - Ryu, Geun-Hwan A1 - Heindel, Tobias A1 - Burger, Sven A1 - Song, Jin-Dong A1 - Rodt, Sven A1 - Reitzenstein, Stephan T1 - Deterministic integration of quantum dots into on-chip multi-mode interference beamsplitters using in-situ electron beam lithography T2 - Nano Lett. Y1 - 2018 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/6610 VL - 18 SP - 2336 ER -