TY - JOUR A1 - Plock, Matthias A1 - Burger, Sven A1 - Schneider, Philipp-Immanuel T1 - Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology T2 - Proc. SPIE Y1 - 2021 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/8263 VL - 11783 SP - 117830J ER -