@article{PlockBurgerSchneider2021, author = {Matthias Plock and Sven Burger and Philipp-Immanuel Schneider}, title = {Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology}, journal = {Proc. SPIE}, volume = {11783}, pages = {117830J}, doi = {10.1117/12.2592266}, year = {2021}, }