TY - GEN A1 - Plock, Matthias A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Schneider, Phillip-Immanuel A1 - Burger, Sven T1 - Research data for "Fabrication uncertainty guided design optimization of a photonic crystal cavity by using Gaussian processes" T2 - Zenodo Y1 - 2024 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/9479 SP - doi: 10.5281/zenodo.8131611 ER -