@article{PlockBinkowskiZschiedrichetal.2024, author = {Matthias Plock and Felix Binkowski and Lin Zschiedrich and Phillip-Immanuel Schneider and Sven Burger}, title = {Fabrication uncertainty aware and robust design optimization of a photonic crystal nanobeam cavity by using Gaussian processes}, journal = {J. Opt. Soc. Am. B}, volume = {41}, pages = {850}, doi = {10.1364/JOSAB.505767}, year = {2024}, }