@article{FarchminHammerschmidtSchneideretal.2020, author = {Nando Farchmin and Martin Hammerschmidt and Philipp-Immanuel Schneider and Matthias Wurm and Bernd Bodermann and Markus B{\"a}r and Sebastian Heidenreich}, title = {Efficient Bayesian inversion for shape reconstruction of lithography masks}, journal = {J. Micro/Nanolith. MEMS MOEMS}, volume = {19}, pages = {024001}, doi = {10.1117/1.JMM.19.2.024001}, year = {2020}, }