TY - CONF A1 - Hammerschmidt, Martin A1 - Zschiedrich, Lin A1 - Siaudinyté, Lauryna A1 - Manley, Phillip A1 - Schneider, Philipp-Immanuel A1 - Burger, Sven T1 - Forward simulation of coherent beams on grating structures for coherent scatterometry T2 - Proc. SPIE Y1 - 2023 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/9193 VL - PC12619 SP - PC1261907 ER -