@inproceedings{HammerschmidtZschiedrichSiaudinyteetal.2023, author = {Martin Hammerschmidt and Lin Zschiedrich and Lauryna Siaudinyt{\´e} and Phillip Manley and Philipp-Immanuel Schneider and Sven Burger}, title = {Forward simulation of coherent beams on grating structures for coherent scatterometry}, booktitle = {Proc. SPIE}, volume = {PC12619}, pages = {PC1261907}, doi = {10.1117/12.2673231}, year = {2023}, }