TY - JOUR A1 - Pflüger, Mika A1 - Kline, R. Joseph A1 - Fernández Herrero, Analia A1 - Hammerschmidt, Martin A1 - Soltwisch, Victor A1 - Krumrey, Michael T1 - Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering T2 - J. Micro Nanolithogr. MEMS MOEMS Y1 - 2020 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/7685 VL - 19 SP - 014001 ER -