@article{PfluegerKlineFernandezHerreroetal.2020, author = {Mika Pfl{\"u}ger and R. Joseph Kline and Analia Fern{\´a}ndez Herrero and Martin Hammerschmidt and Victor Soltwisch and Michael Krumrey}, title = {Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering}, journal = {J. Micro Nanolithogr. MEMS MOEMS}, volume = {19}, pages = {014001}, doi = {10.1117/1.JMM.19.1.014001}, year = {2020}, }