TY - JOUR A1 - Plock, Matthias A1 - Binkowski, Felix A1 - Zschiedrich, Lin A1 - Schneider, Phillip-Immanuel A1 - Burger, Sven T1 - Fabrication uncertainty aware and robust design optimization of a photonic crystal nanobeam cavity by using Gaussian processes T2 - J. Opt. Soc. Am. B Y1 - 2024 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/9475 VL - 41 SP - 850 ER -