@inproceedings{ScholzeLaubisDerschetal.2007, author = {Frank Scholze and Christian Laubis and Uwe Dersch and Jan Pomplun and Sven Burger and Frank Schmidt}, title = {The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Harald Bosse}, volume = {6617}, pages = {66171A}, year = {2007}, }