@article{PetrikKumarFriedetal.2015, author = {Peter Petrik and Nitish Kumar and Miklos Fried and B{\´a}lint Fodor and Gy{\"o}rgy Juh{\´a}sz and Silvania Pereira and Sven Burger and H. Paul Urbach}, title = {Fourier ellipsometry - an ellipsometric approach to Fourier scatterometry}, journal = {J. Eur. Opt. Soc.-Rapid}, volume = {10}, pages = {15002}, doi = {10.2971/jeos.2015.15002}, year = {2015}, }