@inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Sven Burger and Roderick K{\"o}hle and Lin Zschiedrich and H. Nguyen and Frank Schmidt and Reinhard M{\"a}rz and Christoph N{\"o}lscher}, title = {Rigorous Simulation of 3D Masks}, booktitle = {Photomask Technology}, editor = {P. Martin and R. Naber}, volume = {6349}, pages = {63494Z}, url = {http://arxiv.org/pdf/physics/0610218}, year = {2006}, }