TY - CONF A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Schädle, Achim A1 - Schmidt, Frank T1 - Domain decomposition method for electromagnetic scattering problems: application to EUV lithography T2 - Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices Y1 - 2005 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/2598 SP - 55 EP - 56 ER -