TY - CONF A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Evanschitzky, Peter A1 - Erdmann, Andreas A2 - Kawahira, H. A2 - Zurbrick, L. S. T1 - Benchmark of rigorous methods for electromagnetic field simulation T2 - Photomask Technology Y1 - 2008 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/1989 UR - http://dx.doi.org/10.1117/12.801248 VL - 7122 SP - 71221 PB - Proc. SPIE ER -