TY - CONF A1 - Burger, Sven A1 - Kleemann, B. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures T2 - Microtechnologies for the New Millenium Y1 - 2009 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/1965 VL - 7366 SP - 736621 PB - Proc. SPIE ER -