TY - CONF A1 - Kleemann, B. A1 - Kurz, J. A1 - Hetzler, J. A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/2258 VL - 8083 SP - 808309 PB - Proc. SPIE ER -