TY - CONF A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Köhle, Roderick A1 - Küchler, Bernd A1 - Nölscher, Christoph T1 - EMF Simulations of Isolated and Periodic 3D Photomask Patterns T2 - Photomask Technology Y1 - 2007 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/1988 UR - http://arxiv.org/pdf/0709.3934 VL - 6730 SP - 6630 PB - Proc. SPIE ER -