TY - CONF A1 - Pomplun, Jan A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Reduced basis method for real-time inverse scatterometry T2 - Modelling Aspects in Optical Metrology III Y1 - 2011 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/2335 VL - 8083 SP - 808308 PB - Proc. SPIE ER -