@article{EndresBurgerWurmetal.2013, author = {Johannes Endres and Sven Burger and Matthias Wurm and Bernd Bodermann}, title = {Numerical investigations of the influence of different commonly applied approximations in scatterometry}, journal = {Proc. SPIE}, volume = {8789}, pages = {878904}, doi = {10.1117/12.2022108}, year = {2013}, }