@inproceedings{ScholzeBodermannBurgeretal.2014, author = {Frank Scholze and Bernd Bodermann and Sven Burger and Johannes Endres and Anton Haase and Michael Krumrey and Christian Laubis and Victor Soltwisch and Albrecht Ullrich and Jan Wernecke}, title = {Determination of line profiles on photomasks using DUV, EUV and X-ray scattering}, booktitle = {Proc. SPIE}, volume = {9231}, pages = {92310M}, doi = {10.1117/12.2065941}, year = {2014}, }