@inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Jan Pomplun and Lin Zschiedrich and Sven Burger and Frank Schmidt and Jacek Tyminski and Donis Flagello and N. Toshiharu}, title = {Reduced basis method for source mask optimization}, booktitle = {Photomask Technology}, volume = {7823}, pages = {78230E}, doi = {10.1117/12.866101}, year = {2010}, }