TY - JOUR A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Bodermann, Bernd T1 - Fast simulation method for parameter reconstruction in optical metrology T2 - Proc. SPIE Y1 - 2013 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/2653 VL - 8681 SP - 868119 ER -