TY - CONF A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank A1 - Kato, Akiko A1 - Laubis, Christian A1 - Scholze, Frank T1 - Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations T2 - Photomask Technology 2011 Y1 - 2011 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/1992 VL - 8166 SP - 81661Q PB - Proc. SPIE ER -