TY - CONF A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Köhle, Roderick A1 - Henkel, Thomas A1 - Küchler, Bernd A1 - Nölscher, Christoph A2 - Bosse, Harald T1 - 3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method T2 - Modeling Aspects in Optical Metrology Y1 - 2007 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/1987 VL - 6617 SP - 66170V PB - Proc. SPIE ER -