TY - CONF A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Gao, W. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph A2 - Weed, J. A2 - Martin, P. T1 - Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation T2 - Photomask Technology Y1 - 2005 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/1967 VL - 5992 SP - 378 EP - 389 PB - Proc. SPIE ER -