@inproceedings{BurgerKoehleZschiedrichetal.2005, author = {Sven Burger and Roderick K{\"o}hle and Lin Zschiedrich and W. Gao and Frank Schmidt and Reinhard M{\"a}rz and Christoph N{\"o}lscher}, title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation}, booktitle = {Photomask Technology}, editor = {J. Weed and P. Martin}, volume = {5992}, pages = {378 -- 389}, doi = {10.1117/12.631696}, year = {2005}, }