@article{BodermannBuhrDanzebrinketal.2011, author = {Bernd Bodermann and Egbert Buhr and Hans-Ulrich Danzebrink and Markus B{\"a}r and Frank Scholze and Michael Krumrey and Matthias Wurm and Petr Klapetek and Poul-Erik Hansen and Virpi Korpelainen and Marijn van Veghel and Andrew Yacoot and Samuli Siitonen and Omar El Gawhary and Sven Burger and Toni Saastamoinen}, title = {Joint Research on Scatterometry and AFM Wafer Metrology}, journal = {AIP Conference Proceedings}, volume = {1395}, number = {1}, pages = {319 -- 323}, doi = {10.1063/1.3657910}, year = {2011}, }