TY - JOUR A1 - Endres, Johannes A1 - Burger, Sven A1 - Wurm, Matthias A1 - Bodermann, Bernd T1 - Numerical investigations of the influence of different commonly applied approximations in scatterometry T2 - Proc. SPIE Y1 - 2013 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/2812 VL - 8789 SP - 878904 ER -