@inproceedings{MukherjeeBurgerSiefkeetal.2024,
  author    = {Deshabrato Mukherjee and Sven Burger and Thomas Siefke and Jeetendra Gour and Bernd Bodermann and Peter Petrik},
  title     = {Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method},
  booktitle = {EPJ Web of Conferences},
  volume    = {309},
  pages     = {02016},
  doi       = {10.1051/epjconf/202430902016},
  year      = {2024},
}