@misc{PlockBinkowskiZschiedrichetal., author = {Matthias Plock and Felix Binkowski and Lin Zschiedrich and Phillip-Immanuel Schneider and Sven Burger}, title = {Research data for "Fabrication uncertainty guided design optimization of a photonic crystal cavity by using Gaussian processes"}, journal = {Zenodo}, doi = {10.5281/zenodo.8131611}, pages = {doi: 10.5281/zenodo.8131611}, language = {en} }