@inproceedings{ManleyKruegerBodermannetal.2023, author = {Phillip Manley and Jan Kr{\"u}ger and Bernd Bodermann and Rainer K{\"o}ning and Andreas Heinrich and Christian Eder and Aksel Goehnermeier and Ulrike Zeiser and Martin Hammerschmidt and Lin Zschiedrich and Philipp-Immanuel Schneider}, title = {Efficient simulation of microscopic imaging for reconstruction of nanostructures}, booktitle = {Proc. SPIE}, volume = {PC12619}, pages = {PC126190B}, doi = {10.1117/12.2673077}, year = {2023}, }