@inproceedings{KruegerBodermannKoeningetal.2023, author = {Jan Kr{\"u}ger and Bernd Bodermann and Rainer K{\"o}ning and Phillip Manley and Lin Zschiedrich and Philipp-Immanuel Schneider and Andreas Heinrich and Christian Eder and Ulrike Zeiser and Aksel Goehnermeier}, title = {On aberration retrieval for optical microscopes in length metrology}, booktitle = {Proc. SPIE}, volume = {PC12619}, pages = {PC126190A}, doi = {10.1117/12.2672294}, year = {2023}, }