@article{SchneiderManleyKruegeretal.2022, author = {Philipp-Immanuel Schneider and Phillip Manley and Jan Kr{\"u}ger and Lin Zschiedrich and Rainer K{\"o}ning and Bernd Bodermann and Sven Burger}, title = {Reconstructing phase aberrations for high-precision dimensional microscopy}, journal = {Proc. SPIE}, volume = {12137}, pages = {121370I}, doi = {10.1117/12.2620762}, year = {2022}, }